ECE 654: Plasma Processing (tentative)
ECE 654: Plasma Processing (tentative). Week 1-3: Introduction, dc Discharges, PDP/BLU Week 4-6: Waves, Transport, CCrf Disch. Week 7-9: ICP, Collisions Week 10-12: Global Modeling, NL Sheath Week 13-15: Etching, Diagnostics. Plasma Application Modeling @ POSTECH.
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