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Integration of amorphous silicon photodiodes to microfluidic scintillation detectors. Master Project Intermediate presentation – 03/07/14 Cindy Wiese. Pyrex. Photodiode. Reflective coating. Goal of the project. Silicon. Microchannels : Vertical sidewalls Tilted tips
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Integration of amorphoussilicon photodiodes to microfluidic scintillation detectors Master Project Intermediatepresentation – 03/07/14 Cindy Wiese
Pyrex Photodiode Reflectivecoating Goal of the project Silicon • Microchannels: • Vertical sidewalls • Tiltedtips • Contains the liquidscintillator • Aluminium coating for light reflection • Photodiodes: • p-i-n structure (in reverse voltage) to optimizeelectronscollection in the depletion zone • Amorphoussilicon to avoid radiation damages
Notchingeffect • Channelslength = 5 mm
Conclusion on roughnessimprovementprocesses • KOH etching + Wetox + BHF etching: • Improvemicroscopicroughness • KOH + IPA etching: • Improvemacroscopicroughness (smoothed profil, lownotching)
Notchingeffect • 40% KOH etching
Wafers inventory • Microfluidic tests:
Wafers inventory • Scintillation detectors: