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Historical Survey. 1972 Aisenberg and Chabot : Arc Ion Beam 1979 Holland and Ohja : PACVD 1984 Mori and Namba : Ion Plating 1986 Savvides : Sputtering 1992 Collins et al : Laser Ablation Filtered Vacuum Arc.
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Historical Survey • 1972 • Aisenberg and Chabot : Arc Ion Beam • 1979 • Holland and Ohja : PACVD • 1984 • Mori and Namba : Ion Plating • 1986 • Savvides : Sputtering • 1992 • Collins et al : Laser Ablation • Filtered Vacuum Arc