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Nanotechnology Symposium

Nanotechnology Symposium. Theory and structure Specifications How to use / select Applications. Theory and structure. What is a Linear Shaft Motor?. It is a direct drive linear brushless servomotor!. Linear Servomotor Classification. Linear Induction Motor (LIM) Linear Pulse Motor (LPM)

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Nanotechnology Symposium

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  1. Nanotechnology Symposium

  2. Theory and structure • Specifications • How to use / select • Applications

  3. Theory and structure

  4. What is a Linear Shaft Motor? It is a direct drive linear brushless servomotor!

  5. Linear Servomotor Classification • Linear Induction Motor (LIM) • Linear Pulse Motor (LPM) • Linear DC Motor (LDM) --- Voice Coil Motor • Linear Synchronous Motor (LSM) • Flat type • With core • Coreless • Cylindrical type • With core • Coreless ---- Linear Shaft Motor

  6. Force Velocity Curve Efficiency Published Peak Force F - V Output Published Continuous Force Actually, linear F-V curve is a characteristic of DC motor. S605Q Specification Curve

  7. Synchronous Motor F vs. C

  8. Design Concept • Simple • High precision • Non-contact

  9. Design Concept: Simple US Patent 06,040,642 US Patent 2006162650A

  10. Design Concept: Simple Magnetic field distribution Simulated by FEM Actual

  11. Linear Shaft Motor Principle Force Flux Fleming’s law Current

  12. Design Concept: High Precision • Coreless design • No iron in forceror shaft • No cogging • Stiff design • The coils themselves are the core, thus the stiffness of an iron core design

  13. Design Concept: Non-Contact Large Air Gap0.5mm to 1.75mm nominal annular air gap Non-criticalNo variation in force as gap varies over stroke of device

  14. Design Concept: Non-Contact All flux is effective Only upper side flux is effective Coil Coil Magnetic Flux Magnets • Flat type • Ineffective use of flux (b) Cylindrical type Effective use of flux

  15. Linear Shaft Motor No influence by change of gap Magnet Coil Core(Iron） Coil Magnet Absorption Force S N S N S N N S N S N S Cogging by concentration of flux Back York(Iron) Linear Motor

  16. Comparison of Linear Motors

  17. Theory and structure • Specifications

  18. Largest Linear Shaft Motor S1000T

  19. Longest Linear Shaft MotorS427Q 4600mm （15’ 1”） Stroke

  20. Smallest Shaft MotorS040: Diameter 4mm(0.16) Width 10mm(0.4”) Stroke 30mm(1.2”) 10 cycle/sec

  21. High speed drive Maximum velocity: 6.3 m/sec (20.7 ft/sec) Motor: S435Q Maximum velocity: 6.3m/sec Acceleration: 13.5G Payload: 20kg (44lbs) Stroke: 800mm 2’7” Encoder: Heidenhain Resolution: 1µm Driver: Servoland SVDM 40P Guide: LM guide

  22. Slow speed drive Velocity fluctuation isunder 1%. Motor: 2-S160T in parallel Maximum velocity: 8 µm/sec Payload: 25kg (55 lbs) Encoder: Heidenhain Resolution: 10 nm Driver: Delta Tau P-Mac Guide: Air bearing

  23. Acceleration Acceleration: 20G (198 m/sec2) Motor: S435Q Maximum velocity: 5m/sec Acceleration: 20G Payload: 1.7kg (4 lbs) Encoder: Mitsutoyo Resolution: 0.5 µm Driver: Servoland SVDM 40P Guide: LM guide

  24. High speed positioning There isno overshoot. And positioning is0.1 micron. Motor: S160T Velocity: 1m/sec Acceleration: 1G Payload: 3kg (6.6lbs) Stroke: 800mm Encoder: Heidenhain Resolution: 0.1µm Driver: Servoland SVDM 2P Guide: LM guide

  25. Velocity fluctuationmedium speed Velocity fluctuation isunder 0.006%. Stage: GTX 250 Motor: S200Q Velocity: 100mm/sec Acceleration: 1G Payload: 25kg (55 lbs) Encoder: Heidenhain Resolution: 0.1µm Driver: Servoland SVDM 5P Guide: Air bearing

  26. Velocity fluctuationvery slow speed Velocity fluctuation is under 0.01%. Encoder: Heidenhain Resolution: 10 nm Driver: Delta Tau P-Mac Guide: Air bearing Motor: 2-S160T in parallel Maximum velocity: 8 µm/sec Payload: 25kg (55 lbs)

  27. 5 nanometer step motion No overshoot No backlash Motor: 2- S320D in parallel Payload: 25kg (55 lbs) Guide: Air bearing Encoder: Heidenhain Resolution: 1 nm Driver: Delta Tau P-Mac

  28. Parallel Motor Example

  29. Parabolic moveConstantly changing velocity Red line: command velocity Blue line: actual velocity Following error Following error is very small. Maximum following error is under 100 nm. Stage: GTX 250 Motor: 2-S160T in parallel Maximum Velocity: 3mm/sec Payload: 10kg (22 lbs) Encoder: SONYBS78 TS13 Resolution: 0.14nm Driver: P-Mac U-mac system Guide: Air bearing

  30. Summary Linear Shaft motor’s capabilities • Maximum force36000N (S1150T) • Smallest motor S040D 25x10x10mm • Longest stroke4.6m (15’ 1”) • Fastest speed6.3m/sec (21ft/sec) • Slowest speed8 µm/sec • Maximum acceleration20G • Velocity fluctuationunder 0.05% • Finest resolution70pm (0.00007µm)

  31. Theory and structure • Specifications • How to use / select

  32. How to construct? Table Forcer (coil) Shaft Support Linear Guide Cable carrier Linear encoder Linear Shaft Motor Linear Shaft Motor

  33. Actual stage (Moving Forcer) Shaft Support Table Linear Shaft Motor Encoder Linear guide

  34. Actual stage (Moving Shaft) Encoder Table Shaft Support Cross Roller Bearings Shaft motor

  35. Linear Shaft Motor Selection Operating Conditions

  36. - Linear Shaft Motor Selection Calculations In these equations, “μ” is the coefficient of friction on the guide. "g" is as the acceleration of gravity. g = 9.81 m/sec2 Continuous Force => Feff Peak Force => larger Fa or Fd

  37. Linear Shaft Motor Selection • Acceleration time 0.15s • Const. speed period 0.6s • Deceleration time 0.15s • Dwell time 0.1s • Mass (Load & Forcer) 25kg • Speed 1.5m/s • Duty 34 % • Acceleration 10m/s2 • Acceleration force 250N Temperature rise is 38℃

  38. LSMART Move data updated Motion Profile Motor Suggestions System input Application testing Move input Create Move Data Motion Calculator Create Data Sheet Motor Selection

  39. Suggested Part number Suggested Part number Suggested Part number LSMART Data Sheet Force Duty Linear Shaft Motor Data Force Velocity Motion Data Motion & Force Profile Amplifier and Encoder sizing data

  40. Advantages of Linear Shaft Motor （In comparison to types of liner motion） • The ability to use commercially available servo drivers. • Higher speeds are able to be achieved while retaining high precision. • At the same time, extremely high precision low speed uniformity and high repeatability are possible. • Because of the non-contact design, no lubrication or adjustment necessary. • Very simple setup and operation time. No need for extended burn in. • Simple alignment and QC period. • Eco-friendly - no noise, no dust. • Energy efficient, - power requirements are lower then that of ball screw systems.

  41. Theory and structure • Specifications • How to use / select • Applications

  42. World Wide Markets Served by Linear Shaft Motor

  43. Inspection machines • HDD • LCD • PCB • 3D • Microscope • Semiconductor • Other

  44. Machining • Milling Machine • Grinders • Press • EDM • Machining center • Laser machine • Wire cut EDM • Other

  45. Manufacturing equipment • LCD • Boiling machine • Injection • Stage • Eject robot • Handling • Semiconductor before process • Semiconductor after process • Bonding • Surface mounter • Organic Electroluminescence (OEL) Display • Robot • Other

  46. Other applications • Office Automation • Medical • Printer • Machine parts • Health • Automatic sliding doors • Food handling • Fiber • Research • Other

  47. Thank You !

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