Development of Scanning Probe Lithography (SPL)
Development of Scanning Probe Lithography (SPL). 1) “ Device fabrication by scanned probe oxidation ”, Science, 1995 2) “ Nanofabrication by scanning probe microscope lithography: A review ”, J. Vac. Sci. Tech., 2005 3) “ Scanning Probe Parallel Nanolithography with Multiprobe Cantilever
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