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Cathodoluminescence Study of AlGaN Thin Films Eric Turner, California University of Pennsylvania.
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Cathodoluminescence Study of AlGaN Thin Films Eric Turner, California University of Pennsylvania The band gap of various AlGaN films grown by metalorganic chemical vapor deposition (MOCVD) was measured by cathodoluminescence. An estimate of aluminum concentration was made using this data and subsequently compared with composition data from strain corrected high resolution x-ray diffraction (HR-XRD). The two sets agreed closely and can be used in tandem to optimize gas ratios in AlGaN growth recipes. Spectra quantifying the AlGaN band gap as the estimated aluminum concentration increases