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EDX Spectroscopy

EDX Spectroscopy. Oxford INCA x-act Elemental identification down to Z=4 (Be) Material identification, contaminate identification, elemental mapping Solar, medical devices, ICs, LEDs, PC boards, MEMs, biological samples, nanoparticles, disk drive, nanostructures, cross-sections.

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EDX Spectroscopy

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  1. EDX Spectroscopy • Oxford INCA x-act • Elemental identification down to Z=4 (Be) • Material identification, contaminate identification, elemental mapping • Solar, medical devices, ICs, LEDs, PC boards, MEMs, biological samples, nanoparticles, disk drive, nanostructures, cross-sections

  2. EDX Spectroscopy SEM image of LED Ag map of LED As map of LED Au map of LED

  3. EDX Spectroscopy Fe map of LED EDX compilation map of LED Al map of LED Ga map of LED

  4. EDX spot analysis • Image and spectrum of Solder ball • Elemental detection of elements above Be • Semi Quantitative

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