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Winter Public Conference ORTC 2010 Update

Winter Public Conference ORTC 2010 Update. A. Allan, Rev 2, 12/02/10. IRC 2010 Update Messages:. 450mm timing presently unchanged from 2009 ITRS position However, FI will extend 300mm wafer generation in parallel line item header with 450mm; and

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Winter Public Conference ORTC 2010 Update

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  1. Winter Public Conference ORTC 2010 Update A. Allan, Rev 2, 12/02/10

  2. IRC 2010 Update Messages: • 450mm timing presently unchanged from 2009 ITRS position • However, FI will extend 300mm wafer generation in parallel line item header with 450mm; and • Emphasize compatibility of productivity extensions into the 450mm generation; • FI update also indicates that its activities are relevant to legacy wafer generations (e.g. MtM technologies) • More than Moore white paper final ITWG draft is completed and available online • New “Moore’s Law and More” Graphic update proposal for the 2011 ITRS Executive Summary Renewal • The 2010 ITWG work is based on frozen 2009 Headers • Technology Pacing focus issues identified and addressed (see Technology Pacing agenda Foil) • Beyond CMOS – • Research tools and material (pre-alpha material and tool) timing needs to be taken into account • PIDS and ERD and ERM are coordinating new technology transfers (e.g. InGaAs; Ge) for 2011 ITRS work Kickoff proposals • ESH shifting focus to future material use and risk mitigation (living “white paper” proposed) on ITRS forum site • IRC 2010 Summary special topics • Energy topic Updated • ERD/ERM Next Memory Storage Spring Meeting completed 3rd conference in Japan at Winter meeting • Technology Pacing CTSG proposals are integrated into PIDS Tables and ORTC Table1 at Dec’10 Japan Workshop for the 2011 ITRS Executive Summary Renewal • Equivalent scaling graphic update for the 2011 ITRS Executive Summary Renewal • Parallel bulk and SOI pathways • Clarification of gate mobility materials pathway • Comparison alignment with ITRS dimensional vs. industry typical “node” trends

  3. IRC/CTSG Winter 2010Technology Pacing Cross-TWG Study Group (CTSG) Agenda: IRC/Technology Pacing CTSG TOPICS - CTSG 2010 Proposals considered During Winter Meeting 2011 Renewal work from 2H10 CTSG Discussions: • PIDS and FEP Memory Survey Proposal Updates - to be used for 2011 Renewal • FEP and Design and System Drivers – will investigate MPU and Leading Edge Logic technology trend proposals for 2011 Renewal Plus Continued 1Q11 CTSG 2011 Renewal work on: • Litho – develop proposals utilizing # of Mask layers inputs [see ICKnowledge (ICK) contribution in backup] • Design/Interconnect - Andrew/Juan-Antonio/Chris Case - reconciled the Interconnect and Design Tables alignment issues • A&P/Design - Bill Bottoms/Andrew/Juan-Antonio – work on proposals for reconciling the Power Dissipation (absolute "hot spot" basis rather than total chip area for 2011 Renewal • PIDS/Design – work on 2011 Renewal proposals for • New Max Chip Frequency trends (lower model basis plus long term trend) • Changes to the 13% PIDS Overhead trend vs. new Design Max Chip Frequency trends; • Updates regarding ring-oscillator basis; • Timing changes to “equivalent scaling” tradeoffs with dimensional scaling • ORTC model update proposals added from work in 2H10 CTSG work for 2011 Renewal

  4. More than Moore: Diversification Analog/RF Passives HV Power Sensors Actuators Biochips Interacting with people and environment Non-digital content System-in-package (SiP) 130nm 90nm Baseline CMOS: CPU, Memory, Logic 65nm Information Processing Digital content System-on-chip (SoC) Combining SoC and SiP: Higher Value Systems More Moore: Miniaturization 45nm 32nm 22nm 16 nm . . . V Beyond CMOS 2010 ITRS Summary Figure 4 Figure 4 The Concept of Moore’s Law and More

  5. 2009 Definition of the Half Pitch – New Poly Definition [No single-product “node” designation; DRAM half-pitch still litho driver; however, other product technology trends may be drivers on individual TWG tables] DRAM ½ Pitch = DRAM Metal Pitch/2 FLASH Poly Silicon ½ Pitch = Flash Poly Pitch/2 • Poly • Pitch MPU/ASIC M1 ½ Pitch = MPU/ASIC M1 Pitch/2 • Metal • Pitch 8-16 Lines 32-64 Lines Typical flash Un-contacted Poly Typical DRAM/MPU/ASIC Metal Bit Line Source: 2009 ITRS - Exec. Summary Fig 1 2010- Update Flash Poly Definition

  6. Metal High k 2nd generation nth generation D S High-µ InGaAs; Ge; ? Si + Stress 2009 ITRS hi-perf GLpr : 54nm 47nm 47nm 41nm 35nm 31nm 28nm 20nm 14nm 2009 ITRS hi-perf GLph : 32nm 29nm 29nm 27nm 24nm 22nm 20nm 15nm 12nm PDSOI FDSOI 2009 ITWG Table Timing: 2007 2010 2013 2016 2019 2021 54nm 45nm 32nm 22nm 16nm 11nm 2009 IS ITRS Flash Poly : 68nm 45nm 32nm 22nm 16nm 2009 IS ITRS DRAM M1 : MPU/hpASIC “Node”: “45nm” “32nm” “22nm” “16nm” “11nm” “8nm” = Additional timing movement considerations for 2011 ITRS work 2009 ITRS MPU/hpASIC M1 : 76nm 65nm 54nm 45nm 38nm 32nm 27nm 19nm 13nm Updated Proposal - for 2011 work [from 11/11 CTSG; 11/15 IRC telecon] 2010 ITRS Summary Figure 3 “Equivalent Scaling” Roadmap Figure 3 ORTC Table 1 Graphical Trends (including overlay of 2009 industry logic “nodes” and ITRS trends for comparison) Metal Metal Gate-stack material High k High k Channel material D S Possible Pull -in Multi-gate (on bulk or SOI) Structure (electrostatic control) Bulk Possible Delay 2009 2012 2015 2018 2021 6 See also PIDS, FEP, ERD, and ERM chapters’ text and tables for additional detail)

  7. 2010 Update ITRS ORTC Technology Trend Pre-Summary • ORTC Model Proposals to TWGs for TWG Interdependency Preparation for other ORTC section features: • “Equivalent Scaling” timing unchanged in 2010 for ERD/ERM early research and transfer to PIDS; however need for continued discussion about transfer of alternative Gate Material technology in 2011 Renewal • Logic “Equivalent Scaling” Roadmap Timing Update underway, and ongoing discussion of alignment of “node” and dimensional Trends for 2011 Renewal • New “More than Moore” (MtM) white paper completed for 2011 ITRS Renewal impact and added to the ITRS website at www.itrs.net • MPU contacted M1 • Unchanged for 2010 [validated by FEP data] • 2-year cycle trend through 2013 • Cross-over DRAM M1 2010/45nm • Smaller 60f2 SRAM 6t cell Design Factor • Smaller 175f2 Logic Gate 4t Design Factor • Two proposals[2011 Renewal work]: for Design TWG to evaluate possible 1-year M1 delay (IC TWG: two companies not meeting roadmap); and also evaluate alignment of “nodes” with latest M1 industry status and also High Performance/Low Power timing needs (Taiwan IRC request) • DRAM contacted M1 • Unchanged for 2010: Dimensional M1 half-pitch trends remain unchanged from 2007/08/09 ITRS; new 4f2 Design factor begins 2011 • Proposal [2011 Renewal work]: 1-year pull-in of M1 and bits/chip trends to end of roadmap*; 4f2 push out [to 2013]; *no Flattening of DRAM M1 as with Flash Poly** • Flash Un-contacted Poly • Unchanged for 2010: 2yr cycle trend through 2010/32nm; then 3yr cycle and also added “equivalent scaling” bit design: • Inserted 3bits/cell MLC 2009-11; and delayed 4bits/cell (2 companies in production) until 2012 • Proposal #1[2011 Renewal work]: 1.5-2-year pull-in of Poly; however slower ~4-year cycle trend to 2015/18nm; then 3-year trend to 2022; ** then Flat Poly after 2022/8nm; and 3bits/cell extended to 2018; 4bits/cell delay to 2019 • Additional Proposal consideration underway for 2011 Renewal due to recent announcements

  8. 2010 Update ITRS ORTC Technology Trend Pre-Summary (cont.) 5)Unchanged for 2010 Tables: MPU GLpr – ’08-’09 2-yr flat; Low operating and standby line items track changes • Unchanged for 2010 Tables: MPU GLph – ’08-’09 2-yr flat with equiv. scaling process tradeoffs; Low operating and standby line items track changes • Performance targets (speed, power) on track with tradeoffs 7)Primarily Unchanged [corrections to Intro Level product line items – see backup] for 2010 Tables: MPU Functions/Chip and Chip Size Models • Utilized Design TWG Model for Chip Size and Density Model trends – tied to technology cycle timing trends and updated cell design factors • ORTC line item OverHead (OH) area model, includes non-active area • ORTC model impact updating from PIDS/FEP Survey proposals evaluation underway for 2011 Renewal] • DRAM Bits/Chip and Chip Size Model Unchanged for 2010 Tables - 3-year generation “Moore’s Law” doubling cycle; • smaller Chip Sizes (<60mm2) with 4f2 design factor included • ORTC model impact updating from PIDS/FEP Survey proposals evaluation underway for 2011 Renewal] • Flash Bits/Chip and Chip Size Model Unchanged for 2010 Tables • 2-year generation “Moore’s Law” doubling cycle; • growing Chip Sizes after return to 3-year technology cycle • ORTC model impact updating from PIDS/FEP Survey proposals evaluation underway for 2011 Renewal] • IRC 450mm Position: Pilot lines/2012; Production/2014-16 Unchanged for 2010; also Unchanged: “double S-curve” graphic in 2010 Update Summary • 450mm Program status and Long-Range IEM v12 Demand Update Scenario was presented by ISMI to IRC for 2011 ITRS Renewal preparation • ISMI is pursuing 450mm program activities to meet the ITRS Timing • Evaluation of possible impact of a delayed scenario is underway for 2011 ITRS Renewal preparation

  9. 2010 ITRS Summary Figure 1 Figure 1 ORTC Table 1 with PIDS update proposals for 2011 ITRS effort) [including PIDS 2011 Roadmap Flash and DRAM Trend Driver Proposals] Note: additional proposals for 2011 ITRS work are under consideration due to recent additional industry technology implementation acceleration announcements. Updates will be delivered at public meetings in 2011.

  10. 16nm Near-Term Long-Term 2010 ITRS Summary Figure 2 Figure 2 ORTC Table 1 Graphical Trends (including overlay of PIDS update proposals for 2011 ITRS effort) 2013: PIDS DRAM 4f2 Design Factor bits/cell push-out PIDS DRAM Projection ~1-yr pull-in 42nm M1 to 2010 (2 co’s); Then 3-yr cycle to 2024/8nm; 2019: PIDS Flash 4 bits/cell push-out PIDS Flash Projection ~2-yr pull-in 26nm Poly half-pitch to 2010 (2 co’s); Then ~4-yr cycle to 2020/10nm; Then 3-year cycle to 2022/8nm;Then flat Memory PIDS 2011 Proposals Source: 2009 ITRS - Executive Summary Fig 7a

  11. 16nm Near-Term Long-Term 2010 ITRS Summary Figure 5a Figure 5a DRAM and Flash Memory Half Pitch Trends Source: 2009 ITRS - Executive Summary Fig 7a

  12. 16nm Near-Term Long-Term 2010 ITRS Summary Figure 5b Figure 5b MPU/high-performance ASIC Half Pitch and Gate Length Trends

  13. MPU/ASIC Alignment With Latest Design TWG Actual SRAM [60f2] & Logic Gate [175f2] DRAM 4f2 Added Beginning 2011 Flash [4f2] 1) 2-yr Cycle Extended to 2010; 2) 3 bits/cell added 2009-2011; 3) 4 bits/cell moved To 2012 2010 ITRS Summary Figure 6 Figure 6 2009 ITRS Product Function Size Trends:MPU Logic Gate Size (4-transistor); Memory Cell Size [SRAM (6-transistor); Flash (SLC and MLC), and DRAM (transistor + capacitor)] 2009 ITRS: 2009-2024 Function Size Square Micrometers (um2)

  14. 2010 ITRS Summary Figure 7a Figure 7a 2009 ITRS Product Technology Trends: Memory Product Functions/Chip and Industry Average “Moore’s Law” and Chip Size Trends

  15. 2011: “22nm”/(38nm M1) MPU Model Generations 2010 ITRS Summary Figure 7b Figure 7b 2009 ITRS Product Technology Trends: MPU Product Functions/Chip and Industry Average “Moore’s Law” and Chip Size Trends

  16. Production Development Manufacturing Consortium Pilot Line 22nm (extendable to 16nm) M1 half-pitch capable tools Alpha Tool Beta Tool Tools for Pilot line Volume 32nm (extendable to 22nm) M1 half-pitch capable Beta tools by end of 2011 Beta Tool Production Tool 450mm 32nm M1 half-pitch Pilot Line Ramp 2010 2011 2012 2013 2014 2015 2016 Years 2010 ITRS Summary Figure 8 Figure 8 A Typical Wafer Generation Pilot Line and Production “Ramp” Curve applied to Forecast Timing Targets of the 450 mm Wafer Generation

  17. 2010 Winter Meeting Public Conference Backup • ITRS “S-curves” Ramp Timing definition • ERD/ERM “Beyond CMOS” Definition Graphic • ORTC Table 2D corrections • SICAS Capacity Analysis Graphics 60nm Split-out Analysis Update • Typical Industry “Node” Tracking vs ITRS Technology Trends Work in Progress – Do Not Publish!

  18. Production Ramp-up Model and Technology/Cycle Timing 200K Development Production Volume (Wafers/Month) 20K 2K Alpha Tool Beta Tool Production Tool 200 First Two Companies Reaching Production 20 First Conf. Papers 2 Additional Lead-time: ERD/ERM Research and PIDS Transfer 0 12 24 -24 -12 Months 2009 WAS 2010 Unchanged Production Ramp-up Model and Technology Cycle Timing *Examples: 25Kwspm ~= 4.5Mu/mo @ 280mm2 10Mu/mo @ 140mm2 15Mu/mo @ 100mm2 22mu/mo @ 70mm2 Source: 2009 ITRS - Exec. Summary Fig 2a Work in Progress – Do Not Publish!

  19. ERD/ERM Long-Range R&D and PIDS Transfer Timing Model Technology Cycle Timing [Example: MOSFET High-mobility Channel Replacement Materials] 200K Production Research Development 20K 2K Transfer to PIDS/FEP (96-72mo Leadtime) Alpha Tool Beta Tool Product Tool Volume (Wafers/Month) 200 1st 2 Co’s Reach Product 20 First Tech. Conf. Device Papers Up to ~12yrs Prior to Product First Tech. Conf. Circuits Papers Up to ~ 5yrs Prior to Product 2 0 24 -96 -72 -24 -48 Months Hi-m Example: 2011 2013 2015 2017 2019 2021 Source: 2009 ITRS - Executive Summary Fig 2b 2009 WAS 2010 Unchanged Work in Progress – Do Not Publish!

  20. Ferromagnetic Logic Devices Spin Logic Devices Baseline CMOS Ultimately Scaled CMOS Functionally Enhanced CMOS Nanowire Electronics 32nm 22nm 16nm 11nm 8nm New State Variable Multiplegate MOSFETs New Devices Channel Replacement Materials New Data Representation Low Dimensional Materials Channels New Data Processing Algorithms “More Moore” “Beyond CMOS” Computing and Data Storage Beyond CMOS Source: Emerging Research Device Working Group [2009 – Unchanged] 2008 ITRS “Beyond CMOS” Definition Graphic Work in Progress – Do Not Publish!

  21. ORTC Table 2D - Including Corrections Work in Progress – Do Not Publish!

  22. ORTC Table 2C - Including Corrections Work in Progress – Do Not Publish!

  23. Technology Cycle Timing Compared to Actual Wafer Production Technology Capacity Distribution >0.7mm 0.7-0.4mm 0.4-0.3mm 0.3- 0.2mm 0.2- 0.16mm 0.16-.12mm 0.08-.12mm <0.08mm <0.06mm = 2003/04 ITRS DRAM Contacted M1 Half-Pitch Actual = 2007/09 ITRS DRAM Contacted M1 Half-Pitch Target = 2009 ITRS Flash Un-contacted Poly Half Pitch Target = 2009 ITRS MPU/hpASIC Contacted M1 Half-Pitch Target 2008/09 ITRS: 2.5-Year Ave Cycle for DRAM 3-Year Cycle 2-Year DRAM Cycle 3-Year DRAM Cycle ; 2-year Cycle Flash and MPU 2010 2013 4Q09 SICAS Update Proposal From Furukawa-san/Japan To IRC 3/28/10 (modified by AA) Feature Size (Half Pitch) (mm) 3-Year Cycle After 2010 for Flash; after 2013 For MPU Year Year * Note: The wafer production capacity data are plotted from the SICAS* 4Q data for each year, except 2Q data for 2009.  The width of each of the production capacity bars corresponds to the MOS IC production start silicon area for that range of the feature size (y-axis). Data are based upon capacity if fully utilized. Source: 2009 ITRS - Executive Summary Fig 3 Work in Progress – Do Not Publish!

  24. Industry “Node”* Alignment w/ITRS [2009 ITRS] 2.5 7.5 ‘99 ‘01 ‘03 ‘05 ‘07 ‘09 ‘11 ‘13 ‘15 ‘00 ‘02 ‘04 ‘06 ‘08 ‘10 ‘12 ‘14 Year DRAM Density “Equiv. Scaling”: 8f2 8f2 6f2 4f2 TBD TBD TBD 1.0f2:4b/cell Flash Density MLC “Equiv. Scaling”: 16/11/8/5.5/4f2: 2b/cell 2.0f2: 2b/cell 1.5f2: 3b/cell TBD TBD TBD Copper Strain HiK/MGI, II FDSOI MUGFET; SiGE Hi-u tbd TBD MPU Perform/Power “Equiv. Scaling”: PastFuture Dimensional Half Pitch Scaling (EOT not shown): Hi-Performance MPU/hpASIC Public Node References*; +extrapolation “Node” “8.0” “5.6” “4.0” “11” “160” “110” “80” “55” “40” “28” “20” -> “180” “130” “90” “65” “45” “32” “22” “16” 303 255 214 180 151 127 107 90 76 64 54 45 38 32 27 24 ~Actual 21 19 ‘16 ‘17 ‘18 ‘19 ‘20 ‘21 ‘22 ‘23 ‘24 ‘25 207 207 180 180 157 151 127 136 119 107 103 90 90 76 78 64 54 68 45 59 52 38 32 45 28 40 36 25 32 22 20 28 18 25 16 22 DRAM Actual M1 Flash Actual Poly 16 11 8 11 8 6 ’14-’16: 300mm->450mm @ 32nm->22nm M1 ’01-’03: 200mm->300mm @ 180nm->130nm M1 PastFuture 2009 ITRS hi-perf GLpr : 54nm 47nm 47nm 41nm 35nm 31nm 28nm 20nm 14nm 2009 ITRS hi-perf GLph : 32nm 29nm 29nm 27nm 24nm 22nm 20nm 15nm 12nm 2009 ITRS: 2009-2024 *Notes on “Nodes”: DRAM, Flash “Nodes” ~= M1 and Poly Half-pitch. However high performance Logic (MPU, hpASIC) may have node “labels” Associated with their dimensional technology progress, as referenced in: 2009 ITWG Table Timing: 2007 2010 2013 2016 2019] 1) MPU reference: Mark Bohr Tutorial, Jul’09: http://www.wesrch.com/Documents/view_editorial.php?flag=3&editorial_id=EL1FYLN 68nm 45nm 32nm 22nm 54nm 16nm 45nm 32nm 22nm 16nm 2009 IS ITRS DRAM M1 : 11nm 2009 IS ITRS Flash Poly : 2) hpASIC reference TSMC “Nodes” Articles: http://www.xbitlabs.com/news/other/display/20080930205529_TSMC_Unveils_32nm_28nm_Process_Technologies_Roadmap.html ; http://www.eetimes.com/news/semi/showArticle.jhtml?articleID=177100620 MPU/hpASIC “Node*”: “45nm” “32nm” “22nm” “16nm” “11nm” “8nm” 2009 ITRS MPU/hpASIC M1 : 76nm 65nm 54nm 45nm 38nm 32nm 27nm 19nm 13nm ’91-’93: <200mm ->200mm @ 0.5u->0.35u M1 Industry Typical “Node” vs ITRS M1 and Poly Alignment MPU & ASIC Low-Power versions typically lag Gate Length to manage power and performance trade-offs at the same M1-based density “Node” as high-performance versions

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