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OPTICON OPTICAL REPLICATION EXPERIMENTS REVIEW

OPTICON OPTICAL REPLICATION EXPERIMENTS REVIEW. Reflex s.r.o., Prague, Czech Republic. Veronika Semencová, Libor Švéda, Adolf Inneman, René Hudec , Ladislav Pína , Michaela Skulinová. S PECTROSCOPY. 1 star - apperture + optical fiber + spectrometer more stars - star by star (slow)

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OPTICON OPTICAL REPLICATION EXPERIMENTS REVIEW

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  1. OPTICONOPTICAL REPLICATION EXPERIMENTS REVIEW Reflex s.r.o., Prague, Czech Republic Veronika Semencová, Libor Švéda, Adolf Inneman, René Hudec, Ladislav Pína,Michaela Skulinová IBWS 2006, VLAŠIM

  2. SPECTROSCOPY 1 star - apperture + optical fiber + spectrometer more stars - star by star (slow) - more appertures + optical fibers + several spectrometers - faster? IBWS 2006, VLAŠIM

  3. SLICING THE FOCAL IMAGE IBWS 2006, VLAŠIM

  4. y l x SLICING OUTPUT Data cube IBWS 2006, VLAŠIM

  5. HOW TOSLICE? IBWS 2006, VLAŠIM

  6. GOALS • electroplating process with minimized stress • repeated replication from one mandrel • double replication (mandrel – mother – daughter) simple mandrel image slicer • quality tests of replicas IBWS 2006, VLAŠIM

  7. REPLICATION TECHNOLOGY mandrel metrology separation layer electroforming separation (mandrel–mother) metrology(mandrel–mother) separation layer electroforming separation (mother-daughter) metrology data processing, evaluation of the results IBWS 2006, VLAŠIM

  8. (galvanic bath chemistry optimization) INTERNAL STRESS Bath 1 Bath 2 Bath 3 Bath 4 • minimalizing the internal stress • length difference is proportional to internal stresses IBWS 2006, VLAŠIM

  9. DOUBLE REPLICATIONa) GNIRSb) MIRI no.004c) LFM 7 PUPIL MIRROR IBWS 2006, VLAŠIM

  10. daughter mandrel mother mother mandrel daughter daughter mother mandrel DOUBLE REPLICATION GNIRI MIRI no.004 IBWS 2006, VLAŠIM

  11. hor radius comparison mandrel – daughter GNIRS SLICER daughter mandrel R = 150.5 mm R = 145.8 mm Taylor-Hobson profilometer measurements at Reflex IBWS 2006, VLAŠIM

  12. hor ver GNIRS SLICER radius of curvature (R) Taylor-Hobson profilometer measurements at Reflex IBWS 2006, VLAŠIM

  13. GNIRS SLICER deviation mandrel - daughter IBWS 2006, VLAŠIM

  14. MIRI no.004 deviation mandrel – daughter 5th step 9th step IBWS 2006, VLAŠIM

  15. MIRI no.004 deviations mandrel – daughter (from 2 to 12 step) IBWS 2006, VLAŠIM

  16. radius comparison mandrel–mother-daughter (from 2 to 13 step) MIRI no.004 IBWS 2006, VLAŠIM

  17. mandrel daughter IBWS 2006, VLAŠIM

  18. mandrel daughter IBWS 2006, VLAŠIM

  19. CONCLUSIONS double replica from GNIRS, MIRI no.004 and LFM 7 PUPIL MIRROR slicer realized deviation between mother and daughter is smaller than deviation between mandrel and mother surface shape accuracy nearl/4 for 1 µm internal stresses in electroplated layers and their dependence on electrolyte composition for shape control IBWS 2006, VLAŠIM

  20. END  THANK YOU  IBWS 2006, VLAŠIM

  21. IBWS 2006, VLAŠIM

  22. Shape difference mandrel – replica (>> internal stresses study is necessary) LFM challenger No.2 (Th01a) LFM challenger No.7 (Th02a) LFM challenger No.5 (Th05a) IBWS 2006, VLAŠIM

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