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SEM- Schematic Overview. Electron Detection. Tungsten Filament Electron Source. Filament Emission. Field Emission Gun. Magnetic Lenses. Focusing Optics. Effect of Working distance. Effect of Condenser Lense. Aberations to Minimum Spot Size.
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Characteristic X-rays • Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5
Effect of Working Distance and Aperture on Depth of Focus ( in m)
X-ray Detection Gas Proportional Counter Single Channel Pulse Height Detector