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Overview Guide to SEMI Standard for 450mm Wafers

Overview Guide to SEMI Standard for 450mm Wafers. December 10, 2010. The List of Published 450mm SEMI Standards. SEMI M74 - 1108 : Specification for 450mm Diameter Mechanical Handling Polished Wafer SEMI M76 - 0710 : Specification for Developmental 450mm Diameter Polished Single Crystal Wafer

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Overview Guide to SEMI Standard for 450mm Wafers

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  1. Overview Guide to SEMI Standard for 450mm Wafers December 10, 2010

  2. The List of Published 450mm SEMI Standards • SEMI M74 - 1108 : Specification for 450mm Diameter Mechanical Handling Polished Wafer • SEMI M76 - 0710 : Specification for Developmental 450mm Diameter Polished Single Crystal Wafer • SEMI E154 - 0310: Mechanical Interface for 450mm Load Port • SEMI E156 - 0710 : Mechanical Specification for 450mm AMHS Stocker to Transport Interface • SEMI E158 - 0710 : Mechanical Specificationfor Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling • SEMI E159 - **** : Mechanical Specificationfor Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 MAC) and Kinematic Coupling

  3. Overview of 450mm SEMI Standards E110(Operetor Interface) E84(Carrier Hand off Parallel I/O) E156(Stocker Interface) Carriers: E158(450FOUP), E159(450 MAC), Mxx(450 FOSB) M74, M76, Mxx(Wafer) E144(RF Air Interface) E154(FOUP & MAC Load Port) or E1xx(FOSB Load Port) E84(Carrier Hand off Parallel I/O) E83(PGV Docking Flange)

  4. 450mm/300mm Comparison Table

  5. E72(Equipment Footprint, Height, and Weight) Overview of 300mm SEMI Standards (Reference) E110(Operetor Interface) E21.1(Cluster-Tool Module Interface) Carriers: E47.1(FOUP), E1.9(Cassette), M31(FOSB), E103(SWIF), E119(FOBIT) E22.1(Cluster-Tool End Effector) M1, M28(Wafer) E144(RF Air Interface) E57(Kinematic Coupling) E62(FIMS) E15.1(Load Port) E84(Carrier Hand off Parallel I/O) E64(Cart Docking Interface) E63(BOLTS-M) and/or E92(BOLTS-Light) or E131(IMM) E83(PGV Docking Flange) E26.1(Cluster-Tool Footprint ) and/or E25(Cluster-Tool Access) E85(Stocker Interface)

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