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Joint Research Activity No. 2  Innovative Low Energy Ion Beam Technologies

Joint Research Activity No. 2  Innovative Low Energy Ion Beam Technologies. Co-ordinator:  R.W. McCullough, Queen’s University Belfast, N Ireland, UK, Deputy-coordinator :  R. Trassl, Justus Liebig University, Giessen, Germany Participating countries :

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Joint Research Activity No. 2  Innovative Low Energy Ion Beam Technologies

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  1. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Co-ordinator:  • R.W. McCullough, Queen’s University Belfast, N Ireland, UK, • Deputy-coordinator :  • R. Trassl, Justus Liebig University, Giessen, Germany • Participating countries : • Austria, France, Germany, United Kingdom NewLeif FP6 I3

  2. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Tasks • Ion extraction and beam formation: • Optimised extraction from ECR sources for low ion beam energies • Highly charged ion beams from room-temperature EBIT sources NewLeif FP6 I3

  3. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Advanced ion transport and control systems •  Beams of highly charged ions at eV-energies •   Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution •   A novel technique for ultra high resolution, low energy HCI beam structuring  • Ion beam guiding in nano-capillaries NewLeif FP6 I3

  4. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task A • Optimised extraction from ECR sources for low ion beam energies • Originality of Activity • Combination of computer simulation techniques and experimental emittance measurements • "perfect" geometry and so optimise the extraction for low energy ion beam production with extraction fields of electrostatic and/or magnetic field configurations NewLeif FP6 I3

  5. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • JLU Giessen, Germany + CEA, Caen, France + QUB Belfast, UK • WORK PACKAGE • Specification/simulation/design/construction/emmitance measurements of extraction geometries to be tested • Extracted beam energy distribution measurements • Documentation and dissemination of results • Implementation of optimum geometries throughout I3 ECR sources NewLeif FP6 I3

  6. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task B • Highly charged ion beams from room-temperature EBIT sources • Originality of Activity • lon beams with excellent emittance (1mmmrad / 10 keV/q) • nano-positioning of single HCIs • innovative cooling techniques to achieve energy spreads in the meV *q range NewLeif FP6 I3

  7. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • FZR, Rossendorf, Germany + QUB, Belfast, UK • WORK PACKAGE • Design/implementation of beam retardation system coupled to EBIT and ECR • Implementation/characterization of 14.5GHZ 2kW ECRIS • X-ray spectroscopy, q/A analysis diagnostics of a room-temperature EBIT • Implementation/test of computer-added beam control • Test of ECR operation in DC and afterglow mode • Test of EBIT operation in pulsed and leaky mode • Surface modification experiments • Design/test of an EBIT with ion production on zero potential NewLeif FP6 I3

  8. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task C • Beams of highly charged ions at eV-energies • Originality of Activity • High intensity, low emittance, low energy spread, low energy (eVs) HCI beams • Combination of electrostatic and magnetic elements combined with nano-optical system of IMS and nanocapillary guiding/focusing techniques of HMI. NewLeif FP6 I3

  9. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • CEA Caen + QUB Belfast • WORK PACKAGE • Installation /diagnostic and optimisation of prototype beam line • Improvement of vacuum conditions and magnetic sheilding • Development of beam purifying system • Experimental study of beam energy distribution • Integration of a beam-pulsing system for specific time-shaping • Replacement of the ECR-ion source • Delivery of intense eV, highly charged high quality ions beams NewLeif FP6 I3

  10. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task D • Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution • Originality of Activity • the trapping and cooling of the ions before extraction • novel single-ion positioning and control optics NewLeif FP6 I3

  11. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • MPIK Heidelberg, Germany, + University of Duisberg-Essen, Germany • WORK PACKAGE • Ion beam optics simulations • Ion optics design specifications, purchasing • Mechanical engineering: drawings and construction • Prototype ion focusing system: machining • Ion cooling test for extraction • Vacuum, ion optics assembly vibration insulation tests • Delivery/ installation of AFM • Coupling to EBIT beam line, beam tuning • Sample preparation and irradiation studies with semiconductors • Scanning of complex patterns: electronic tests; data acquisition NewLeif FP6 I3

  12. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task E • A novel technique for ultra high resolution, low energy HCI beam structuring • Originality of Activity • Concept for a reduction ion-optical system for very low HCI energies • ultra high resolution (<10 nm, depending on the quality of the illumination system) with very low energy HCI’s • The desired low beam energy at the wafer level 20 eV per charge is achieved by an innovative imaging strategy NewLeif FP6 I3

  13. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • IMS, Vienna, Austria + New LEIF partners • WORK PACKAGE • Definition of User Requirement Specs • Design of HCI-optics • HCI-optics fabrication • Demo experiments (IMS + New LEIF partners) • JRA joint experiments: HCI nanostructuring • Industry feasibility study • Prototype tool design and fabrication­ (if consortium can be formed) NewLeif FP6 I3

  14. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task F •  Ion beam guiding in nano-capillaries • Originality of Activity • potentially important applications in both macroscopic and mesoscopic focusing • may provide superior focusing than conventional methods NewLeif FP6 I3

  15. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • HMI, Berlin, Germany + QUB, Belfast, UK • WORK PACKAGE • Macroscopic focusing by ion guiding • Mesoscopic • Focusing by ion guiding • Research on the technique to guide ions in capillaries • Application of AFM/STM NewLeif FP6 I3

  16. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • . Ion focusing by capillary guiding • fast ion tracks produced bent foil • after etching of the capillaries and stretching of the foil slow ions are focused on a spot using guiding effects • fast ion tracks are produced in a plane foil • the foil is bent leading to focusing by guiding effects NewLeif FP6 I3

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