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From Ink-Jet Technology to Nano Array Writing Technology. By Szu-kang Hsien Ayodeji Coker. OVERVIEW. Objective. Approach. Our Nano Array Writing Device. Conclusion. Acknowledgements. OBJECTIVE. The use of nano-technology and microfabrication techniques for nano array writing.
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From Ink-Jet Technology to Nano Array Writing Technology By Szu-kang Hsien Ayodeji Coker
OVERVIEW • Objective. • Approach. • Our Nano Array Writing Device. • Conclusion. • Acknowledgements.
OBJECTIVE • The use of nano-technology and microfabrication techniques for nano array writing. • Replacing conventional lithography methods with nano array writing capable of producing 30nm line widths. • The independent control of each AFM tip used in the nano-array writing technology using comb-drive actuators.
APPROACH • Using the concept employed in Dip Pen Nanolithography (DPN) for nano array writing. • Using ink-jet technology as a mode of delivering ink to an AFM tip capable of writing line widths on the order of nano-meters. • Motion control in the x-y-z plane is done using comb-drive and electrostatic actuators.
INK JET TECHNOLOGY • Drop On Demand (DOD) ink-jet printing is to be utilized in our device. • A high voltage is to be applied to a PZT crystal causing it to bend. This effect in turn applies a pressure on the ink reservoir. • As a result of the applied pressure, the reservoir jets out ink on demand, in our case to coat the AFM tip.
INK JET TECHNOLOGY • A change in voltage gives rise to a corresponding change in force and the resulting dimensional change in length. • V=dijFjx/(orA) • F will be 0.11 N using PZT film dimension 100m*100m, er=3000, d11=370 pC/N, d31=110 pC/N, V=10V and x = 2m. • The displacement of the crystal, L= LV/(td31), will be around 0.2m. • So we can stack around 5 PZT crystals together in order to have 1m pressing into the ink
DIP-PEN NANOLITHOGRAPHY (DPN) • Old technique of dip pen writing. • In place of the nib used in the regular dip-pen, an AFM tip is employed. • Using ink-jet technology, “ink” is transported to the AFM tip, which it coats. • The ink is delivered to the substrate, by choosing an “ink” and substrate that have an affinity for one another e.g ODT and Au.
ATOMIC FORCE MICROSCOPE (AFM) • AFM relies on a scanning technique to to produce very high resolution 3-D images of sample surfaces. • There are three methods used in AFM applications. They are the contact mode, the intermittent contact mode and the non contact imaging. • The method employed NAWT is the intermittent contact mode method.
Force vs. distance curve showing tip sample Separation of different AFM operating modes.
COMB DRIVE AND ELECTROSTATIC ACTUATORS • A large number of fine interdigiated fingers are actuated by applying a voltage between them. • This will provide the x-y motion for our device. • The z-motion is achieved by electrostatically actuating the cantilever on which the AFM is attached.
Our Nano Array Writing Device • Ink Jet Structure. • Scream Process for the fabrication of the comb drive actuators. • AFM tip fabrication. • 3-D image of our nano array writing device.
Conclusion • Technology is feasible. • NAWT is a faster way of doing lithography. • Comb drive in Collaboration with electrostatic cantilever deflection is a good method of control in all 3 dimentions.
Acknowledgements. • Prof. Horacio Espinosa for his guidance and advice. • Prof. Chad Mirkin for taking time to provide us with all the necessary information on DPN. • Zhu the TA for all the literature and help he gave us.