BASIC ENERGY SCIENCES -- Serving the Present, Shaping the Future

1. BASIC ENERGY SCIENCES -- Serving the Present, Shaping the Future Transmission Electron Aberration-free Microscope (TEAM) Project Update Altaf H. Carim Division of Materials Sciences and Engineering Office of Basic Energy Sciences U.S. Department of Energy Basic Energy Sciences Advisory Committee meeting July 23, 2002

2. Energetic electrons as a probe of matter • strong (Coulombic) interactions (with both electrons and nuclei) • very short wavelengths (~ 2.5 pm at 200 kV) • high source brightness (~ 1032 s-1 m-2 ster-1) • readily focused (can form images; probes ≤ 0.1 nm for scanning) • exceptional spatial resolution (can exceed 0.1 nm for imaging)

3. HC ADF hw SCAN 2 SCAN 1 TEM STEM High-energy electron scattering: TEM, STEM Ray diagrams illustrating reciprocity (courtesy J. Silcox) Controlled environment TEM at University of Illinois at Urbana-Champaign (courtesy FS-MRL, UIUC)

4. Collaborative effort from four DOE-BES centers Electron Microscopy Center for Materials Research Advanced Photon Source Materials Preparation Center Center for Microanalysis of Materials Newest NSRCs at ANL and BNL Advanced Light Source Intense Pulsed Neutron Source National Center for Electron Microscopy National Synchrotron Light Source Molecular Foundry Spallation Neutron Source Stanford Synchrotron Radiation Lab Center for Nanophase Materials Sciences Linac Coherent Light Source Shared Research Equipment Program Combustion Research Facility High-Flux Isotope Reactor Los Alamos Neutron Science Center Center for Integrated Nanotechnologies James R. MacDonald Lab Pulse Radiolysis Facility

5. What is the TEAM project? • A collaborative development project to design, build, and operate next-generation electron microscopes • Capitalize on several recent major developments, including the correction of limiting lens aberrations • Definition of a common base instrument platform, with a modular approach to tailoring instruments for specific purposes • Focus on enabling new, fundamental science via • quantitative in-situ microscopy • synchrotron spectral resolution at atomic spatial resolution • sub-Ångstrom resolution in real time and 3-D

6. Beam Path High takeoff angleLine of Sight to Sample for Deposition and Detectors Shrouding and support:Designed to Allow Insertion of Experiment Station Feed throughsProvide Electrical and Mechanical Connection Objective lens: - Large gap- Low Cc Side View Experimental insert: Designed for each experiment removable w/o disturbing optics.Structural support for experiments Module loading(4” Port) - Easily inserted- Stage is integral to module (side entry or transfer) Top View Courtesy Robertson, Twesten, Petrov & Zuo Modular experimental stations for in-situ work

7. Modular MEMS specimen holder for in situ studies (Initial designs can be employed in current generation microscopes.) Electron transparent window Transportable specimen holder MEMS specimen Volume available for experimental tools Feed-through Electron transparent window Wide-bodied stage Front-end of stage Department of Energy National Microscopy User Facilities, FS-MRL, ANL, LBL, ORNL Modular sample holder configurations

8. E2 > E1 spherical aberration chromatic aberration Spherical and Chromatic Aberration rchr ≈ Cc (ΔE / E0) β rchr is disk of confusion from chromatic aberration rmin ≈ 0.6 λ3/4 Cs1/4 rmin is resolution limit

9. Benefits of Aberration Correction contrast Cs-corrected Lorenzlens + Monochromator PCTF Cs-Cc-corrected d Å A lens design at 200 kV intended for magnetic imaging (Lorentz microscopy) maintaining a large, field-free volume at the sample (courtesy B. Kabius) Spherical aberration correction provides much higher current at a given probe size for quantitative STEM (courtesy J. Spence)

10. Cc = 5mm 0.80 Cc = 0.1mm 0.60 Cc = 0.01mm 0.40 0.20 0.00 10.0 5.0 3.0 2.0 1.5 1.2 1.0 0.8 0.7 d / Å More Benefits of Aberration Correction Example : Si-K edge, 1.8 keV DE = 50 eV, HT : 200 kV, gap = 25 mm Improvement in spherical aberration provides much improved signal in smaller probe sizes (courtesy J. Silcox) Reducing chromatic aberration enhances resolution and contrast for imaging with electrons undergoing energy losses, allowing chemically-specific images at atomic resolution (courtesy B. Kabius)

11. Quadrupole-sextupole set used to correct aberrations in Gatan imaging filter (enhanced energy-loss spectrometer) (courtesy O. Krivanek) Schematic of proposed “ultracorrector”: quadrupole septuplets + many octupoles (courtesy M. Haider and H. Rose) Hexapoles and transfer doublets correct spherical aberration in current Jülich instrument (courtesy M. Haider and H. Rose) How are aberrations corrected?

12. Impact of Aberration Correction on Microscopy Current STEM (120 keV) {Batson et al.} (Courtesy J. Silcox, after Harald Rose)

13. TEAM aims to enable new fundamental science • Some examples: • Nanoscale tomography, including 3-dimensional determination of glass structure and possibly location of individual point defects • Direct observation of atomic level microstructure during controlled, quantifiable deformation • In-situ control of electric and magnetic fields for direct observations of interfacial structure, segregation, and defects in active devices and changes induced by fields • Single-column microanalysis, including chemical state information available by improved energy resolution

14. Recent breakthroughs and opportunities (courtesy J. Spence)

15. Recent breakthroughs and opportunities (courtesy J. Spence)

16. Recent breakthroughs and opportunities (courtesy J. Spence)

17. Recent breakthroughs and opportunities (courtesy F. Ross)

18. Recent breakthroughs and opportunities (courtesy F. Ross)

19. Recent breakthroughs and opportunities (courtesy F. Ross)

20. Status of TEAM project • Preliminary “vision document” was supplied for BESAC subpanel’s 2000 report; the subpanel recommended favorable consideration of such an effort • Second workshop last week at Berkeley drew attendance of over 100 and very strong interest in, and expressions of support for, the program • Scientific advisory board established to provide guidance • Full proposal involving at least the four electron beam microcharacterization centers, with possible participation from other parties, is expected by the end of the year. • Rough estimates of cost are in the neighborhood of $70M over five years.