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Updates of Iowa State University

Updates of Iowa State University . S. Dumpala , S. Broderick, A. J. Peralta and K. Rajan Mar – 11 - 2013 . Summary of Previous Al oxidation results. Oxidation of Aluminum at 450 C, 2.5 x 10- 3 Torr for 10 min.

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Updates of Iowa State University

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  1. Updates of Iowa State University S. Dumpala, S. Broderick, A. J. Peralta and K. Rajan Mar – 11 - 2013

  2. Summary of Previous Al oxidation results • Oxidation of Aluminum at 450 C, 2.5 x 10-3Torr for 10 min. • Interface shown from reaction of O and Al. Identify Al2O3 as bulk phase of gas-solid reaction • Use of AP results for experimental inputs into ReaxFFsimulations Diffusion Profiles - APT

  3. Present - Al oxidation results Environmental Chamber- APT • Heater stage preheated to 500 C (sample T-300 C) • Pressure – 7x 10 -5 torrfor 5 min • APT – Laser run at 1 nj • Different oxygen species are detected as observed earlier

  4. Study of Interfaces Al- Iso surface 95.23% Diffusion Profiles - APT Al O • Oxidation forming – AlO phase compared to stoichiometric Al2O3 phase observed earlier • Different oxide species observed

  5. Effect of Temperature 723 K 573 K Bulk Al2O3 phase Bulk Al phase Bulk Al phase AlO O Al • XPS, HRTEM also reported formation of limiting thickness Al-deficient phase than Al2O3 at <573 K [1] • The observed formation of stoichiometric Al2O3 phase at higher temperature is consistent with ref [1] for temperature 773 K • The thickness shown to increase with increasing temperature [1] also consistent with APT results. • [1] Jeurgesn L.P.H., et. al., J. App. Phys. 2002, 92, 1649

  6. Future • More experiments as function of temperature and pressures • Study of oxidation mechanism • Testing the Si tips from Maryland

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