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Flip Chip and Wafer Level Packaging Technology at Hong Kong University of Science and Technology 香港科技大學倒裝焊与晶片級封裝技術的研究. Why Flip Chip?. Better manufacturing yield than wirebond for high pin-count chips. 對于高密度引腳芯片,成品率优于丝键合。 Faster manufacturing through-put than wirebond for high pin-count chips.
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Flip Chip and Wafer Level Packaging Technology atHong Kong University of Science and Technology香港科技大學倒裝焊与晶片級封裝技術的研究
Why Flip Chip? • Better manufacturing yield than wirebond for high pin-count chips. 對于高密度引腳芯片,成品率优于丝键合。 • Faster manufacturing through-put than wirebond for high pin-count chips. 對于高密度引腳芯片,生产效率高于丝键合。 • More reliability than wirebonded chips. 可靠性优于丝键合封装芯片。 • Better electrical characteristics (less inductance) for high-speed chips. A must for RF, optoelectronics, high-speed digital (>500MHz). 对于高速芯片,具有良好的电学性能。
More on Why Flip Chip? • Desirable for high-performance Ball Grid Array (BGA) package. 高性能球形焊点阵列封装需要倒装焊。 • Desirable for Chip Size Package (CSP). 芯片尺寸封装技术需要倒装焊。 • The Flipchip bonded wafer market is predicted to grow 37% annually while the overall IC units will only grow 8%. 倒装焊晶片市场预计年增长37%,而整体IC增长仅8%。 • The Flipchip bonded wafer is expected to increase from 3.4 million (2000) to 26.2 million (2005) wafers. 倒装焊晶片预计由三百四十万片(2000年)增长至二千六百二十万片(2005年)。
Forecast on IC Unit IC产量预测(2000-2005) Compound Annual Growth Rate: 8.3% Units (Billion) Year Source: Electronic Trend Publications Inc, 2001
DQ Forecast Bare Die Usage(1999-2004) (Units in Million) Source: Dataquest, April 2001
Year 2000 2001 2002 2003 2004 2005 No. of Bumped Wafers 3.4 6.86 10.4 14.8 20 26.2 Forecast on Bumped Wafers Usage凸点晶片使用预测 (2000-2005) (Units in Million) Source: Dataquest, April 2001
Technology Leaders are Sold on Flip Chip倒装焊在技术领先企业中的应用 • Intel has migrated completely to flip chip bonded BGA for the Pentium 4 product family due to high clock speed and high pin-count (>4000). 鉴于高速和高引脚(>4000)要求,Intel已在奔腾4产品系列中完全采用倒装焊键合的BGA技术。 • The most advanced opto-electronics components from NTT uses flip-chip technology exclusively. 来自NTT的最新光电器件也使用了倒装焊技术 。 • IBM has used flip-chip >30 years. 倒装焊技术已在IBM使用了超过30年
Low Risk and Established Infrastructure低风险和建厂基础 • Well established industrial infrastructure. 良好的建厂工业基础 • Production equipment similar to chip and printer circuit board industries. 生产设备与芯片和印刷电路板工业相近 • Compatible to Surface Mount Technology (SMT). 与表面贴装技术兼容 • Produce smaller and lighter electronic module than wirebonded chips. 生产的电子模块比丝键合小且轻
Flip Chip and Wafer Level PackagingTechnology in HKUST香港科技大學倒裝焊与晶片級封裝技術的研究 • Electroplating solder bumping (Mainstream Flip Chip Technology) 电镀凸点工艺(主流倒装焊凸点技术) • Electroless UBM and stencil printing bumping (Lower cost Flip Chip Technology w/o photolithography and vacuum processing) 化学镀凸点下金属(UBM)和丝网印刷凸点工艺(低成本倒装焊技术 - 不需用光刻和真空制造工艺) • Wafer-Level Input/output Redistribution. 晶片级输入/输出再发布工艺
Commercial Applications商业应用 • For Integrated Circuit Wafer Foundry 集成电路晶片制造厂 • Wafer bumping – advanced integrated circuit chips for high-speed, high input/output counts, and for chips going into advanced packages such as Ball Grid Array (BGA) and Chip Size Package (CSP). 晶片凸点制备:用于高速高输入/输出端口的先进集成电路芯片,及先进芯片封装技术,如球形焊点阵列和芯片尺寸封装. • Redistribution of perimeter I/O (designed for wirebonding) to array I/O for advanced packaging. 先进封装技术中再分布工艺(由周边输入/输出至面分布). • For Packaging and Assembly Foundry IC封装和装配厂 • Assembly of Advanced packages such as Ball Grid Array (BGA) and Chip Size Package (CSP). 先进封装的装配,如球形焊点阵列和芯片尺寸封装.