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Weekly Report

Weekly Report. Speaker ： Hong- Ru Li Advisor ： Chao-Wen Liang Date︰2014/07/25. Schedule. Off-axial PSF measurement. According to the Zernike polynomial, the astigmatism is consist of these two equation. According to the Seidel polynomial, the astigmatism this equation.

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Weekly Report

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  1. Weekly Report Speaker：Hong-RuLi Advisor：Chao-Wen Liang Date︰2014/07/25

  2. Schedule

  3. Off-axial PSFmeasurement • According to the Zernike polynomial, the astigmatism is consist of these two equation • According to the Seidel polynomial, the astigmatism this equation • Therefore the relationship of the magnitude and direction of Astigmatism and the Z4、Z5

  4. Off-axial PSFmeasurement • From ZYGO interferometer • From PSF experiment

  5. Off-axial PSFmeasurement The magnitude of Astigmatism with the Rotational angle The direction of Astigmatism with the Rotational angle ZYGO :RMS=0.037563 PSF :RMS=0.043953

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