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Advanced Optics for X’Pert PRO: Hybrid Monochromator for Precision Measurements

Explore the hybrid monochromator, combining an X-ray mirror and a Germanium crystal for high-resolution analysis of epitaxial layers. This tool is ideal for phase analysis, measurements of rocking curves and reciprocal space maps in materials like GaAs. Learn about its applications, advantages, and comparison with other instruments such as the Extended MRD in this comprehensive guide.

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Advanced Optics for X’Pert PRO: Hybrid Monochromator for Precision Measurements

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  1. New optics for X’Pert PRO The hybrid monochromator for high-resolution measurements

  2. Contents • What is a hybrid monochromator? • For which applications can it be used? • What is the advantage in the analysis of epitaxial layers?

  3. What is a hybrid monochromator? • A combination of an X-ray mirror and a channel-cut Germanium crystal • Only Cu K1 is transmitted • The combination gives a high-intensity, parallel, monochromatic X-ray beam • Two varieties: • two bounces in the monochromator • four bounces in the monochromator

  4. For which applications? • Two-bounce type: • Phase analysis on rough samples with complex patterns • Samples in glass capillaries • Four-bounce type: • Measurement of rocking curves and reciprocal space maps

  5. GaAs } 8 x AlAs GaAs substrate Example: measurements on a superlattice • What is a superlattice? • What is the layer thickness?

  6. Which instrument? X’Pert PRO MRD: • Standard MRD • Extended MRD

  7. Standard X’Pert PRO MRD • Tube focus: point • Ge(440) monochromator • Ge(220) monochromator • Tube focus: line • four-bounce hybrid monochromator

  8. Normal MRD: conclusions • Features of the hybrid monochromator • Intensity increase: • > 30 compared with Ge(220) point focus • > 10 compared with Ge(220) asymm. • Fast, compact tool for reciprocal space maps and rocking curves • How can this be compared with Extended MRD?

  9. Extended MRD • Mirror with Ge(220) and Ge(220) asymmetrically channel-cut monochromator • Compare with four-bounce hybrid monochromator • and with Ge(220) point focus

  10. Conclusions (1)

  11. Conclusions (2) • The four-bounce hybrid monochromator is an excellent tool for fast measurements of rocking curves and reciprocal space maps • It can best be used when high intensity is required in combination with moderate resolution • When ultra-high resolution is required, it is easy to change to a four-crystal monochromator

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