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CS184a: Computer Architecture (Structure and Organization). Day 6: January 19, 2005 VLSI Scaling. Today. VLSI Scaling Rules Effects Historical/predicted scaling Variations (cheating) Limits. Why Care?. In this game, we must be able to predict the future Rapid technology advance
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CS184a:Computer Architecture(Structure and Organization) Day 6: January 19, 2005 VLSI Scaling
Today • VLSI Scaling Rules • Effects • Historical/predicted scaling • Variations (cheating) • Limits
Why Care? • In this game, we must be able to predict the future • Rapid technology advance • Reason about changes and trends • re-evaluate prior solutions given technology at time X.
Why Care • Cannot compare against what competitor does today • but what they can do at time you can ship • Careful not to fall off curve • lose out to someone who can stay on curve
Scaling • Premise: features scale “uniformly” • everything gets better in a predictable manner • Parameters: • l (lambda) -- Mead and Conway (class) • S -- Bohr • 1/k -- Dennard
Feature Size l is half the minimum feature size in a VLSI process [minimum feature usually channel width]
Scaling • Channel Length (L) • Channel Width (W) • Oxide Thickness (Tox) • Doping (Na) • Voltage (V)
Scaling • Channel Length (L) l • Channel Width (W) l • Oxide Thickness (Tox) l • Doping (Na) 1/l • Voltage (V) l
Area Capacitance Resistance Threshold (Vth) Current (Id) Gate Delay (tgd) Wire Delay (twire) Power Effects?
l l/k A = L * W A A/k2 130nm 90nm 50% area 2x capacity same area Area
Capacitance per unit area Cox= eSiO2/Tox ToxTox/k Cox k Cox Capacitance
Gate Capacitance Cgate= A*Cox A A/k2 Cox k Cox Cgate Cgate /k Capacitance
VTHVTH /k Threshold Voltage
Saturation Current Id=(mCOX/2)(W/L)(Vgs-VTH)2 Vgs=VV/k VTHVTH /k WW/k LL/k Cox k Cox IdId/k Current
tgd=Q/I=(CV)/I VV/k IdId/k CC/k tgd tgd /k Gate Delay
R=rL/(W*t) WW/k L, t similar R k R Resistance
twire=RC R -> k R C-> C/k twire -> twire …assuming (logical) wire lengths remain constant... Assume short wire or buffered wire (unbuffered wire ultimately scales as length squared) Wire Delay
Resistive Power P=V*I VV/k IdId/k PP/k2 Power Dissipation (Static Load)
Capacitive (Dis)charging P=(1/2)CV2f VV/k CC/k PP/k3 Increase Frequency? tgd tgd /k So: f kf ? P P/k2 Power Dissipation (Dynamic)
Area 1/k2 Capacitance 1/k Resistance k Threshold (Vth) 1/k Current (Id) 1/k Gate Delay (tgd) 1/k Wire Delay (twire) 1 Power 1/k21/k3 Effects?
ITRS Roadmap • Semiconductor Industry rides this scaling curve • Try to predict where industry going • (requirements…self fulfilling prophecy) • http://public.itrs.net
S=0.7 [0.5x per 2 nodes] Pitch Gate MOS Transistor Scaling(1974 to present) [from Andrew Kahng] Source: 2001 ITRS - Exec. Summary, ORTC Figure
Poly • Pitch • Metal • Pitch (Typical MPU/ASIC) (Typical DRAM) Half Pitch (= Pitch/2) Definition [from Andrew Kahng] Source: 2001 ITRS - Exec. Summary, ORTC Figure
1994 NTRS - .7x/3yrs Log Half-Pitch Actual - .7x/2yrs 0.7x 0.7x Linear Time 250 -> 180 -> 130 -> 90 -> 65 -> 45 -> 32 -> 22 -> 16 0.5x Node Cycle Time (T yrs): *CARR(T) = [(0.5)^(1/2T yrs)] - 1 CARR(3 yrs) = -10.9% CARR(2 yrs) = -15.9% N N+1 N+2 * CARR(T) = Compound Annual Reduction Rate (@ cycle time period, T) Scaling Calculator + Node Cycle Time: [from Andrew Kahng] Source: 2001 ITRS - Exec. Summary, ORTC Figure
[from Andrew Kahng] Source: 2001 ITRS - Exec. Summary, ORTC Figure
What happens to delays? • If delays in gates/switching? • If delays in interconnect? • Logical interconnect lengths?
Delays? • If delays in gates/switching? • Delay reduce with 1/k [l]
Delays • Logical capacities growing • Wirelengths? • No locallity: Lk (slower!) • Rent’s Rule • L n(p-0.5) • [p>0.5]
Compute Density • Density = compute / (Area * Time) • k3>compute density scaling>k • k3: gates dominate, p<0.5 • k2: moderate p, good fraction of gate delay • [p from Rent’s Rule again – more on Day12] • k: large p (wires dominate area and delay)
Power Density • P-> P/k2 (static, or increase frequency) • P-> P/k3 (dynamic, same freq.) • A -> A/k2 • P/A P/A … or … P/kA
Cheating… • Don’t like some of the implications • High resistance wires • Higher capacitance • Quantum tunnelling • Need for more wiring • Not scale speed fast enough
R=rL/(W*t) WW/k L, t similar R k R Improving Resistance • Don’t scale t quite as fast. • Decrease r (copper)
Capacitance per unit area Cox= eSiO2/Tox ToxTox/k Cox k Cox Capacitance and Leakage Reduce Dielectric Constant e (interconnect) or Substitute for scaling Tox (gate quantum tunneling)
ITRS 2003 Table 81a
High-K dielectric Survey Wong/IBM J. of R&D, V46N2/3P133--168
Typical chip cross-section illustrating hierarchical scaling methodology Passivation Dielectric Wire Etch Stop Layer Via Global (up to 5) Dielectric Capping Layer Copper Conductor with Barrier/Nucleation Layer Intermediate (up to 4) Local (2) Pre Metal Dielectric Tungsten Contact Plug [from Andrew Kahng]
tgd=Q/I=(CV)/I VV/k Id=(mCOX/2)(W/L)(Vgs-VTH)2 IdId/k CC/k tgd tgd /k Improving Gate Delay Don’t scale V: VV IkI tgdtgd /k2 • Lower C. • Don’t scale V.
Capacitive (Dis)charging P=(1/2)CV2f VV/k CC/k PP/k3 Increase Frequency? f kf ? P P/k2 …But Power Dissipation (Dynamic) If not scale V, power dissipation not scale.
…AndPower Density • PP(increase frequency) • P> P/k(dynamic, same freq.) • A A/k2 • P/A kP/A … or … k2P/A • Power Density Increases …this is where some companies have gotten into trouble…
Physical Limits • Doping? • Features?
Physical Limits • Depended on • bulk effects • doping • current (many electrons) • mean free path in conductor • localized to conductors • Eventually • single electrons, atoms • distances close enough to allow tunneling
What Is A “Red Brick” ? • Red Brick = ITRS Technology Requirement with no known solution • Alternate definition: Red Brick = something that REQUIRES billions of dollars in R&D investment [from Andrew Kahng]
The “Red Brick Wall” - 2001 ITRS vs 1999 Source: Semiconductor International - http://www.e-insite.net/semiconductor/index.asp?layout=article&articleId=CA187876 [from Andrew Kahng]
Conventional Scaling • Ends in your lifetime • …perhaps in your first few years after grad school…