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AOI ( Automatic Optical Inspection )

AOI ( Automatic Optical Inspection ). Presented by: 傅楸善 & 王林農 0917533843 r94922081@ntu.edu.tw 指導教授 : 傅楸善 博士. Camtek. Camtek provides intelligent optical inspection systems. Semiconductor Manufacturing and Packaging High-Density Interconnect Substrates Printed Circuit Board.

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AOI ( Automatic Optical Inspection )

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  1. AOI(Automatic Optical Inspection ) Presented by: 傅楸善 & 王林農 0917533843 r94922081@ntu.edu.tw 指導教授: 傅楸善 博士 Digital Camera and Computer Vision Laboratory Department of Computer Science and Information Engineering National Taiwan University, Taipei, Taiwan, R.O.C.

  2. Camtek • Camtek provides intelligent optical inspection systems. • Semiconductor Manufacturing and Packaging • High-Density Interconnect Substrates • Printed Circuit Board DC & CV Lab. NTU CSIE

  3. Semiconductors • Ensuring high production yields and reliable service life of the device. • Defects in the active die area, may lead to device failure. DC & CV Lab. NTU CSIE

  4. A Natural Born Defect Hunter • Falcons are nature's fastest birds. • Their acute eyesight and flying skills enable them to capture their target in mid-air. • Trained falcons have been used by royalty for hunting since early ages. • Camtek's Falcon offers similar qualities: • Keen vision to detect minute defects, and the speed to do it in rapid motion. But training our Falcon is much easier. DC & CV Lab. NTU CSIE

  5. Falcon 500 • A series of advanced optical inspection systems for wafers. • Designed to ensure known-good die. • Detects visible defects that may impact die integrity or interconnect reliability. DC & CV Lab. NTU CSIE

  6. Falcon 500 Working Theory • Dedicated algorithms analyze probe marks to determine their size, proximity to pad edge and number of touch-downs. • Equipped with the Camtek’s optional Confocal Chromatic Height Sensor (CCS), the Falcon 500 can even plot sampled probe mark profiles. • Proprietary optics provides high resolution and contrast. DC & CV Lab. NTU CSIE

  7. Falcon 500 Working Theory(cont’) • Bright and dark field illuminations bring surface irregularities out while obscuring normal process variations • Working together, the Falcon’s optics, illuminations and sophisticated algorithms provide superb detection with minimal false call rate. Intelligent and intuitive recipe setup adapts detection performance to user preferences. DC & CV Lab. NTU CSIE

  8. Falcon 500 DC & CV Lab. NTU CSIE

  9. Falcon 500 Working Theory(cont’) • Performance Highlights • High throughput for 100% inspection at production rates • New adaptive probe marks analyzing algorithm • Superb surface defect detection • Optional 3D measurement capabilities • Fast, easy and intuitive setup DC & CV Lab. NTU CSIE

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