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Precision Measurement of Pt/PNZT/Pt Capacitor Displacement on Seiko Instruments SPA400 AFM

This study presents results of measuring displacement in a Pt/PNZT/Pt capacitor using Seiko Instruments SPA400 AFM. The 1µm thick 4/20/80 PNbZT film showed a displacement of 23Å at 40V, indicating a d33 value of 57.5. The measurements revealed the film's piezoelectric properties and suggested further analyses for piezoelectric fatigue, frequency response, and imprint utilizing Vision software.

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Precision Measurement of Pt/PNZT/Pt Capacitor Displacement on Seiko Instruments SPA400 AFM

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  1. Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. Radiant Technologies, Inc. August 7, 2001

  2. Sample Description • Capacitor Area: 12µ x 12µ • Construction: Pt/PNZT/Pt • Composition: 4/20/80 PNbZT • PNZT Thickness: 1µm

  3. Displacement at 40V Displacement measured at 40Vwith a measurement period of 1 second.

  4. Displacement at 40V Displacement loop averaged 10 times.

  5. Nested Displacement Loops Displacement measured at 40V, 30V, 20V, and 10V. Measurement period is 1 second.

  6. Conclusion • Precision Premier integrates with the Seiko Instruments AFM family to collect displacement measurements of thin ferroelectric films. • The 1µm thick Radiant 4/20/80 PNbZT film displaced 23Å at 40V giving the film a d33 value of 57.5. • The measured value is the not the true d33value of the film due to strong clamping by the substrate. • Piezoelectric fatigue, frequency response, and imprint can also be measured using the Vision software.

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