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Energy-Dispersed X-Ray spectroscopy(EDX)

Energy-Dispersed X-Ray spectroscopy(EDX). X 光能譜散佈分析儀原理 ： 高能量電子束打至試片上，試片會釋出像是非彈性碰撞電子、二次電子、背向電子、穿透電子、繞射電子、 X 光特性等訊號 EDX 為接收 X-ray 訊號 。 X 射線經由鈹窗到達偵測器，入射之 X-ray 激發偵測器產生電子電洞對，再轉換成電流，經放大器處理，最後由多頻道分析儀， 將 X-ray 能量信號存入其相對應之頻道位置。. Energy-Dispersed X-Ray spectroscopy(EDX). Intensity , cps/ ev.

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Energy-Dispersed X-Ray spectroscopy(EDX)

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  1. Energy-Dispersed X-Ray spectroscopy(EDX) X光能譜散佈分析儀原理： 高能量電子束打至試片上，試片會釋出像是非彈性碰撞電子、二次電子、背向電子、穿透電子、繞射電子、X光特性等訊號EDX為接收X-ray訊號。 X射線經由鈹窗到達偵測器，入射之 X-ray 激發偵測器產生電子電洞對，再轉換成電流，經放大器處理，最後由多頻道分析儀， 將 X-ray 能量信號存入其相對應之頻道位置。

  2. Energy-Dispersed X-Ray spectroscopy(EDX) Intensity , cps/ev Example of an EDX Spectrum of iron Obtained in a scanning electron microscope

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