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Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory. Issues and Trends in Clean Technologies. From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities Tengfang (Tim) Xu, Ph.D., PE

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Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

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  1. Clean Technologies for Controlled Environment Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

  2. Issues and Trends in Clean Technologies From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory June 23, 2005

  3. Outline • Introduction to clean technologies • Cleanrooms and minienvironments • Energy saving opportunities • Case studies • Issues and trends • What’s coming?

  4. Introduction: Cleanroom • Definition • A Cleanroom is "a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g., temperature, humidity, and pressure, are controlled as necessary." • ISO Standard 14644-1

  5. Introduction: Cleanroom • Design • The design of cleanroom HVAC systems requires the unique understanding of cleanliness requirements, guidelines, airflow, filtration, room pressurization, code requirements, specialty equipment, precise control, and many more details. • IEST CC RP12.2 Considerations in Cleanroom Design • Subgroup 1: Cleanroom Design Considerations • Subgroup 2: Installation of Cleanroom Production Equipment • Subgroup 3: Cleanroom Electrical Systems

  6. Introduction: Minienvironment • Definition • A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment • Guidelines • Separative Devices, ISO Standard 14644-7 (IEST) • IEST CC RP28.1: Minienvironments

  7. Minienvironment Applications • A variety of names • “Separative devices,” “separative enclosures,” “isolators,” or “barriers” in the microelectronics, chemical, and pharmaceutical industries • “Safety cabinets” in biomedical and healthcare • “Gloveboxes” in research and defense industry

  8. Clean Technologies for Controlled Environment • Process-driven • contamination • Planning • Design • Qualifications • Operation

  9. Cleanroom Electric Power Cleanroom Measured Power

  10. Energy Savings Opportunities • Efficient Air Systems • initial costs • optimized sizing • utility costs and productivity • non-energy benefits • Energy efficient planning and design – • strategy to achieve cost savings and to improve bottom lines in the industry

  11. Case Studies on Minienvironment/Cleanroom

  12. Why Minienvironment?

  13. Results • Total fan power • Power factor • Pressure control • EPI (W/cfm) • Comparison with Cleanrooms

  14. Results

  15. Results

  16. Issues and Trends… • Issues - Contamination control • Source: particle, molecular, bio, mechanical, electronic • Preciseness, costs, safety, regulation • Trends • Multi-level particle retention and/or bio containment • Minienvironments/Bio-safety cabinet • Nano-tech facilities

  17. Issues and Trends…Standards The Institute of Environmental Sciences and Technology (IEST) • ISO Standard 14644 (1 through 8): Cleanrooms and Controlled Environments • ISO Standard 14698 (1 through 3): Bio-contamination

  18. Issues and Trends… Solutions • Resources for clean technologies • IEST RPs addressing a variety of cleanroom technologies http://www.iest.org/technical/ccwgs.html • Design, construction, operation, compliance, qualifications, procedure, control, etc. • WG12 > WG28 > New WGs on Nano-tech facilities • LBNL • Energy related technologies and strategies

  19. What’s Coming… Stay Tuned • Cleanrooms • Minienvironments - upcoming workshop to • Share knowledge and improve performance of minienvironments • Understand energy implications of minienvironment vs. cleanroom • Develop and identify strategies in energy efficiency for effective environmental control

  20. Questions TTXU@LBL.GOV Lawrence Berkeley National Laboratory

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