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Resistive coating on spacers by ALD 082310

Resistive coating on spacers by ALD 082310. Anil Mane, Qing Peng, Jeffrey Elam. Background work. Experimental details. Objective:. To coat these spacers uniformly, conformally with “ right resistance range ” by ALD. Photographs of the spacers.

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Resistive coating on spacers by ALD 082310

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  1. Resistive coating on spacers by ALD082310 Anil Mane, Qing Peng, Jeffrey Elam

  2. Background work Experimental details Objective: • To coat these spacers uniformly, conformally with “right resistance range” by ALD

  3. Photographs of the spacers 3 different spacers loaded in fine mesh bags for ALD Before ALD R2 R3 Before ALD R1=0.5mm R2=1mm R1 R3=2.5mm Before ALD After ALD After ALD After ALD • Prior to ALD 5min ultrasonic acetone clean • 3 different spacers coated simultaneously by ALD • Uniform and conformal deposition on all three spacers • Both end of spacer has rough surface and need fine polishing

  4. Spacers resistance after ALD • Resistance measured without electrodes (Do we need electrodes?) • Resistance of spacer has apparent size dependent behavior • Need individual ALD process optimization • Ran out spacers samples • Coatings on spacers look splotchy, while same coatings on quartz and silicon witness substrates look uniform – need better procedure for cleaning the glass spacers (e.g. piranha) Next Plan: Once spacers available ALD process optimization for desired resistance

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