1 / 13

P recision E ngineering R esearch G roup

Massachusetts Institute of Technology. Jin Qiu, Joachim Sihler, Jian Li. An Instrument to Measure the Force-Displacement Characteristics of MEMS Mechanisms. Supervisors: Alexander H. Slocum, Jeffrey H. Lang. P recision E ngineering R esearch G roup. Bistable Relay Principle.

duscha
Download Presentation

P recision E ngineering R esearch G roup

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Massachusetts Institute of Technology Jin Qiu, Joachim Sihler, Jian Li An Instrument to Measure the Force-Displacement Characteristics of MEMS Mechanisms Supervisors: Alexander H. Slocum, Jeffrey H. Lang Precision Engineering Research Group

  2. Bistable Relay Principle Precision Engineering Research Group

  3. Snap Through of Bistable Beam Precision Engineering Research Group

  4. Front side Back side Unpredictable tapering of the DRIE process requires post manufacture minitoring to verify mechanical properties Fabrication Imperfectness Precision Engineering Research Group

  5. Prototype (parts mostly made with the waterjet) Precision Engineering Research Group

  6. Needle used for mechanical contact Data acquisition unit with reference flexure, amplification lever, and displacement sensos Prototype Close-ups Precision Engineering Research Group

  7. F D F( ) D Fundamental Goal: Measure the stiffness of a MEMS flexure MEMS flexure D F MEMS MEMS flexure reference flexure kMEMS=FMEMS /  0 1 2 3 4 5 6 7 8 9 9 8 7 6 5 4 3 2 1 0 FMEMS=kref * d2 D MEMS flexure reference flexure =d2-d1 F MEMS 0 1 2 3 4 5 6 7 8 9 9 8 7 6 5 4 3 2 1 0 d d 1 Fundamental F-D curve principle Precision Engineering Research Group

  8. Functionality of the Amplification Lever Design Precision Engineering Research Group

  9. 10 nm resolution Reference: Colin J.H. Brenan et al.: “Characterization and use of a novel optical position sensor for microposition control of a linear motor” , Rev. Sci. Instrum. 64(2), February 1993. HP Barcode Readers as Displacement Sensor Precision Engineering Research Group

  10. Displacement Sensors 2 and 3 in differential configuration Displacement Sensor 1 Fundamental Principle Animation Precision Engineering Research Group

  11. Force error +/- 6.5 % (not to scale) displacement error +/- 10 nm (not to scale) Actual Measurement Data Precision Engineering Research Group

  12. Flextester Pictures of Prober Tips Precision Engineering Research Group

  13. Bistable microrelay used in automotive applications: • 20 milion cars/year (20*106 relays/year) • 5 % of cars/year using it (1*106 relays/year) • 20 relays/car/year (20*106 relays/year) • 1000 relays/wafer (20*103 wafers/year) • 200 days per year • =========================================100 wafers/day ! Market Potential Precision Engineering Research Group

More Related