MICROSENSORS Name: Dileep Kumar Narasani(Cwid:11601629 )

1. MICROSENSORS Name: Dileep Kumar Narasani(Cwid:11601629) Introduction Thermal Sensors: These sensors are used to measure the measurands like temperature, heat flow ,entropy and heat capacity. RadiationSensors: Radiation Micro sensors are sensors which measures the measurands like Gamma rays, X-rays, microwaves ,visible and infrared light waves. Mechanical Sensors: Mechanical sensors are the sensors which measures the measurands like Displacement, velocity, acceleration, force, pressure and amplitude. Chemical Sensors: These Chemical sensors are sensors which measures the measurands like Humidity ,pH level, gas concentration, pollutants, concentration of vapors and odors. Applications: A device which converts a non-electrical variables into electrical variables like currents and voltages is called Sensor. A micro sensor is a sensor which is fabricated by integrated circuit techniques and having physical dimensions of millimeter range. Classification of micro Sensors Magnetic Sensors: Magnetic sensors are the sensors which are useful to measure the measurands like magnetic field, flux, magnetic moment and magnetic permeability. Bio Sensors: Biosensors are the sensors which measures the measurands like sugars, proteins, hormones, antigens. Fabrication Techniques • Different steps in Micro sensors fabrication are as follows • Photolithography • Implantations and diffusions • Deposition processes • Etching processes • Wafer bonding • Trends in sensor technology • Miniaturization • Integration • Sensor arrays Future Scope The applications of micro sensors in home automation and medicine field will increase in future because of ongoing research. References • http://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf • http://en.wikipedia.org/wiki/Sensor • http://tid.uio.no/kurs/fys4260/06-Microsensors.pdf • “Microsensors, Principles and Applications” by J.W. Gardner