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H ardware setup

H ardware setup. Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments : HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu)

erich-rice
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H ardware setup

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  1. Hardware setup Probestation 1:6“(200mm * 300mm + 360° rotation + 15mm Z)QTC Instruments: HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu) Software (user friendly and some error protections) Probestation 2:6“(200mm * 100mm + 15mm Z)IQC Instruments: LCR, electrometer, voltage supply Status: Operational Misc: Homemade relay system (17 channels each) Optical Inspction: Zeiss CMM (500*500*500) Res.: 1mm (Z~5mm)

  2. Chuck

  3. Probestation

  4. Error estimation 1000 measurement runs on one strip (ST teststructure)

  5. Software – Front panel Testing time ~ 2h

  6. Hamamatsu Karlsruhe Probing marks

  7. Pick up tool

  8. Sensor Teststructures Packaging (Hamamatsu) Sandwich packaging in envelope • Bad to handle • Optical inspection  HANDLING  against specification • Takes time • Air cusion effect while placing  gliding

  9. Packaging 2 (ST) • Optical inspection  very good • Easy to take out • All 4 TS available

  10. Optical survey and dimensional measurements

  11. Check Sheet:

  12. Pictures 25mm

  13. Scratchpad used Add DC pad 3 AC pads Rpoly More pictures

  14. Electrical characterization of sensors Changes in measurement with respect to specs Rpoly with 10V Rpoly with 2V

  15. Electrical characterization of sensors Summary

  16. Electrical characterization of sensors CV & IV

  17. Electrical characterization of sensors Rpoly

  18. Electrical characterization of sensors coupling capacitance

  19. Electrical characterization of sensors leakage current

  20. Comparison of our test results with industry results (based on 5 sensor of 8 ) • IV even lower than company measurement • CV perfect agreement • Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only) • No single strip fault (agreement) (neglect Rpoly)

  21. Relevant problems • Nothing Serious • Vdepletion not calculated Improvements: • Automatic web publishing (ready 50%) • Implement Pattern recognition

  22. Optical survey of ST prototype Pinhole or bad coupling capacity No strange electrical behavior

  23. Optical survey of ST prototype 2 Asymmetric cut! Global size OK! Z (mm) Bowl shape!

  24. Pads

  25. Electrical Survey • Very high total leakage current • Depletion voltage fine • One region (7 strip) with a very high leakage current • Some coupling capacitors out of specs

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