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An Integrated MEMS-BiCMOS SINCGARS Transceiver

An Integrated MEMS-BiCMOS SINCGARS Transceiver. Demonstration Schedule Monday, June 5th 12-1PM and 5-6PM Tuesday, June 6th 3-4PM Wednesday, June 7th 5-6PM. Design Automation Conference, June 2000. Michael McCorquodale, Ark Wong, Karthik Nagarajan, Haluk Kulah, Clark T.-C. Nguyen

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An Integrated MEMS-BiCMOS SINCGARS Transceiver

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  1. An Integrated MEMS-BiCMOS SINCGARS Transceiver Demonstration Schedule Monday, June 5th 12-1PM and 5-6PM Tuesday, June 6th 3-4PM Wednesday, June 7th 5-6PM Design Automation Conference, June 2000 Michael McCorquodale, Ark Wong, Karthik Nagarajan, Haluk Kulah, Clark T.-C. Nguyen Center for Integrated Microsystems Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor, Michigan 48109- 2122

  2. Typical Front-End of an RF Receiver

  3. MEMS Filter Antenna Signal Power MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter MEMS Filter w RF Channel Selection with MEMS Desired Information Signal Antenna Signal Power w Front-End filters significantly reduce interfering signals prior to subsequent electronics Channel selection achieved by simply activating the correct filter

  4. Integrated MEMS-BiCMOS SINCGARS Transceiver Architecture

  5. Vertically-Driven Clamped-Clamped mResonator To date, most used design to achieve VHF Smaller mass  higher frequency range

  6. Clamped-Clamped Beam Finite Element Simulation

  7. Free-Free Beam mMechanical Resonators Effectively removes anchor dissipation by removing the anchors themselves

  8. Free-Free Beam Finite Element Simulation

  9. Fabricated PolysiliconFree-Free Beam mResonator Beam Length = 14.3mm Support Length = 13.3mm fo = 71.5MHz Q = 8,250 Quarter-Wavelength Torsional Beam Drive Electrode 1 m 13.3 m 14.3 m Flexural-Mode Beam Ground Plane and Sense Electrode Anchor Anchor

  10. Conclusions • Demonstrated advantages of RF channel selection • Compared proposed architecture to typical architecture • Demonstrated clamped-clamped and free-free beam resonators • Reported typical performance parameters for free-free devices

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