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DB-driven Scan-back with collar Nikon dry obj

DB-driven Scan-back with collar Nikon dry obj. Scan back with a NIKON dry objective (collar correction). Nikon ELWD PlanFluor magnification: 40x (nominal) numerical aperture: 0.60 working distance: 1.8 mm correction range: 0-2 mm Similar to the Zeiss already tested but…

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DB-driven Scan-back with collar Nikon dry obj

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  1. DB-driven Scan-back with collar Nikon dry obj

  2. Scan back with a NIKON dry objective (collar correction) • Nikon ELWD PlanFluor magnification: 40x (nominal) numerical aperture: 0.60 working distance: 1.8 mm correction range: 0-2 mm Similar to the Zeiss already tested but… - The magnification dependency on the correction is lower • The focal plane vertical position dependency on the correction is larger (~ 40 µm). The DC motor, drive belt and serial motor controller used for Zeidd have been mounted in a Nikon microscope. Working conditions: two collar position c.c. 0.0 for the TOP scanning c.c. 0.3 for the BOTTOM scanning

  3. Further improvements and new problems SOFTWAREVERTIGO SCAN 4 (collar correction version) has been further upgraded to take into account also the focal plane shift along the vertical axis due to the correction (~ 40 µm). This effect behaves as a large base shrinkage during the top-bottom linking with the DB-driven processing tools. The exact value of the shift is difficult to be evaluated directly, and has been tuned during the scan back. MECHANICSSome problems occurred during the scan back: • The objective holder (revolver) was not stable when the collar position changes ( little horizontal shift of the bottom field of view). It has been finally blocked with a clamp • Furthermore, sometimes the objective has been found unscrewed. • These problems suggest to substitute the revolver with a more stable single objective holder.

  4. Comparison with previous scan backs: PASSING-THROUGH • Scan back performed on • MIC1 : Zeiss dry microscope • MIC2 : oil microscope • MIC3 : oil microscope • MIC4 : Nikon dry microscope with the same intercalibration, tolerances and drivers • Out of 325 predictions … P = passing throughX = stopping • FAKE STOPPING (± 2 %) : • MIC1 : 24 / 271 ( 9 % ) • MIC2 : 17 / 271 ( 6 % ) • MIC3 : 20 / 271 ( 7 % ) • MIC4 : 27 / 271 (10 % ) • Normalized only with respect to the passing-through sample

  5. MIC3 scan back results: MIC4 scan back results:

  6. Event classification: Event classification:

  7. Conclusions • A scan back with a collar correction nikon dry objective has been performed. • The preliminary results are comparable with the previous scan back obtained with oil obj. • The number of “fake” stopping points is a bit larger (15% instead of 11%) mostly due to the larger background. • The scan back should will be repeated soon in more stable mechanical conditions.

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