Nanotechnology Today & Tomorrow

1. Nanotechnology Today & Tomorrow promise of broad societal benefit from pursuing nanotechnology R&D, including an anticipation of $1 trillion per year by 2015 of products where nanotechnology plays a key role, which would require 2 million workers with nanotechnology-related skills. .....the rate of market increase is expected .... a 25% increase per year .... estimate that by 2020, there will be about $3 trillion in products that incorporate nanotechnology as a key performance component. The nanotechnology markets and related jobs are expected to double each three years. Mihail Roco 9-30-10

2. Center for Nanotechnology Education and Utilization • Home of the Pa Nanofabrication Manufacturing Technology Partnership • National NSF Center for Nanotechnology Applications and Career Knowledge (NACK) since September 2008 The Commonwealth`s Land Grant institution sharing its World-class Expertise and Facilities to create a Nanotechnology Workforce in PA. Applying the Morrill Act to 21st century technology and economics

3. What is the Pennsylvania NMT Partnership? A joint effort among Pennsylvania (PA) post-secondary institutions, industry, and the State with the mission of developing a PA nanotechnology workforce and of incorporating nanotechnology into PA secondary education, post-secondary education, and industry.

4. Develop a workforce for existing and emerging micro- and nanotechnology-based PA industries Bring the high-paying jobs of nanotechnology to Pennsylvanians Encourage the use of nanotechnology by PA industry Create a nanotechnology-knowledgeable PA citizenry PA NMT Overarching Goals

5. A National Model for Nanotechnology Education The Pennsylvania Nanofabrication Manufacturing Technology(NMT) Partnership PA Associate & Baccalaureate Students Grads to local PA Industry “Hands - On” Capstone Semester @ PSU • Semester long - 18 credit hands-on experience offered at Penn State • Integral part of the 37 associate and 21 baccalaureate degree programs at partner institutions across PA • Covers broad applications of micro- and nanotechnology • Cost effective means of bringing nanotechnology training to every corner of Pennsylvania • Student pays their home school tuition and partial room and board • remainder of the true cost is covered by the PA DCED • 626 Capstone Semester graduates to date • 99 PA Institutions have hired Capstone grads for micro- and nanotechnology jobs • 1132 Educators & Industry personnel have completed nanotechnology workshops

6. Summary of Skills Taught in the PA Capstone Semester • Basic Nanotechnology EHS Awareness • Basics of Chemical and Material Properties—Role of Scale • Chemical and Materials Handling, Storage, and Disposal • Nanotechnology Health, Safety, and Environmental issues Nanotechnology Equipment and Processing Foundation Skills • Chemical Hoods and Glove Boxes: Use and Maintenance • Cleanrooms: Use and Maintenance • Pumps, Flow Control Systems, Scrubbers, Sensors: Use and Maintenance • Vacuum Systems: Use and Maintenance • Plasma Generating Systems: Use and Maintenance • Furnaces, Ovens, and Rapid Thermal Annealing Equipment: Use and Maintenance • Chemical Facilities and Maintenance • Contamination Control • Process Integration • Introduction to Statistical Process Control • NanotechnologyPatterning: Foundation Skills • Optical, e-beam, and Ion Beam Lithography • Stamping and Imprinting Lithography • Block co-polymer and SAM techniques • Nanotechnology Fabrication Skills • Top-down Fabrication • Reactive Ion, Sputter, and Wet Etching • Chemical Vapor and Physical Vapor Deposition Systems • Ion Beam, Plasma, and Chemical Materials Modification • Nanoparticles: Etching and Grinding Approaches • Bottom-up Fabrication • Chemical, Physical, and Biological Self-Assembly • Nanoparticles: Colloidal Chemistry • Nanoparticles: Plasma Approaches • Nanoparticles: Chemical Vapor Deposition Approaches • Nanotechnology Characterization Skills • Optical Microscopy • Scanning Probe Microscopy • Atomic Force Microscopy • Electron Microscopy • Scanning Electron Microscopy (SEM and FE-SEM) • Transmission Electron Microscopy (TEM and FE-TEM) • Chemical Characterization • X-ray (EDS) • Secondary Ion Mass Spectroscopy • Auger Electron Spectroscopy • Fourier Transform Infrared Spectroscopy • Electrical Characterization • Current-Voltage Measurements • Capacitance Measurements • Opto-electronic Device Measurements • Physical Characterization • Spectrophotometer • Profilometer • X-ray Diffraction • Nanotechnology Professional Skills • Team Building • Problem Solving • Project Organization and Planning • Research Skills • Assessing Cost of Ownership • Presentation Skills • Technical Reporting and Documentation • Handling and Generating Intellectual Property

7. Diversity & Growth of Disciplines Housing Degree Programs in Nanotechnology

8. PA Institutions That Have Hired NMT Capstone Semester Graduates For Micro- and Nanotechnology Jobs II-VI Corporation Accellent Adhesives Research Advanced Acoustic Concepts Advanced Gas Technologies Advanced Powder Products Advantech Agere Alcoa Allied Electronics Alden Products AMAX Minerals Amedeo Apogee Photonics Arrow International Avail Technologies BioElectroSpec B. Braun Cabot Carbon NanoProbes Chemcut Correge Sensors Cosmos Technologies Crystalplex Cyoptics Dana Corporation Doucette Industries Drexel University DRS Laurel Technologies East Penn Manufacturing Eastman Chemical Company Ex One Fairchild Semiconductor Fincor Automation First Energy F.S. Elliott GlaxoSmithKline GTS Hale Products Hershey Medical Center Illuminex Infinera IQE Johnson & Johnson Johnson Matthey Judson Technologies Keystone Communications Keystone Engineering Kongsberg Defense Kurt J. Lesker Kyowa America LCM Technologies Lehighton Electronics Lockheed Martin Lucent Technologies Lutron Electronics Maxima Technologies Meadow Burke Products Membrane Assays Merck NanoHorizons North American Hoganas Optellios Philips Medical Systems Philips Respironics Plextronics PPG PPL Probes Unlimited Proconex PSU Applied Research Lab PSU Dubois PSU Electro Optics Center PSU CNEU QorTek Rhetech Rohm and Haas Ross Technologies RJ Lee Schroeder Industries Scientific Systems Seagate Technologies SI International Solar Innovatioins Solarity Spectrum Technologies Strategic Polymers Structure Probes Synthes Textron Lycoming Thermo Electric PA Transene Tyco Electronics University of Pittsburgh Vectron International Western Digital Westfalia Technologies Westmoreland Mech. Testing & Research Xactix 3-30-11

9. PA NMT Results PA Companies who have hired Capstone Grads

10. PA NMT CONTACTS Stephen J. Fonash Director 112 Lubert Building 814-865-4931 sfonash@psu.edu Osama Awadelkarim Associate Director 407D EES Building 814-863-7697 ooaesm@engr.psu.edu Terry Kuzma NMT Instructor 114 Lubert Building 814-863-5484 txk107@psu.edu Dave Johnson Laboratory Coordinator 114 Lubert Building 814-865-3019 duj123@psu.edu Sebastien Maeder Outreach / Research Associate 114 Lubert Building 814-867-2948 abm123@psu.edu Lisa Daub Administrative Assistant 112 Lubert Building 814-865-9635 ldaub@engr.psu.edu Susan Barger Administrative Support Assistant 112 Lubert Building 814-863-2955 sbarger@engr.psu.edu Robert Ehrmann Director of Education & Outreach 112 Lubert Building 814-865-7558 rke2@psu.edu Bringing Nanotechnology to Education & Industry! www.nano4me.org/PaNMT

11. The Pennsylvania State University Nanofabrication Laboratory , An NSF National Nanotechnology Infrastructure Network Site Website: http://www.nnin.org/nnin_psu.html Director of Operations: William M. Mansfield (wmm14@psu.edu) Introduction: The Penn State Nanofab, located in the MRI building at Innovation Park, and soon moving to a new facility in the Millennium Science Complex on the University Park campus, is a full service micro- and nanofabrication user facility supporting all aspects of ‘top-down’ and ‘bottom up’ fabrication. The site provides users with access to facilities that enable fabrication of a wide range of electrical, optical, and micromechanical devices to support fundamental and applied research in diverse fields spanning electronics to medicine. Millennium Science Complex Capabilities Lithography: Electron beam, Nanoimprint, Optical Step and Repeat, Optical contact, Optical contact with backside IR alignment. Deposition/growth: Atomic Layer Deposition, Thermal and e-gun Evaporation with ion assist, Low pressure chemical vapor deposition (CVD), Plasma enhanced CVD, Standard and high temperature sputtering, Parylene polymer deposition User Interaction, Fees: Company employees trained to work in cleanroom or remote use of contractors or Nanofab staff. Daily cleanroom access fee with per run and hourly equipment charges. Intellectual Property: All IP developed by the user belongs to the user. All IP developed by the user and staff is jointly owned with PSU. Etching:Reactive Ion Etching, Magnetically enhanced RIE, Inductively coupled plasma, Wet chemical etching, Focused ion beam etching Characterization: SEM, FESEM, four-point probe, optical microscopy, I-V/C-V,FTIR, probe station, ellipsometry, profilometry Substrate, deposited and processed materials: Si, poly and amorphous doped and undoped Si, Ge, SiO2, SixNy, low stress SixNy, porous Si, AlGaAs, InGaAsP, PMN-PT, PZT, LiNbO3, sapphire, glass, quartz, PDMS, spin-on dielectrics and others. Training: Extensive training and education on equipment operation and processing is available to any user if needed. Contact Information: Jaime Reish Administrative Assistant 188 MRI (814) 865-7348 jdr15@psu.edu