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What is MEMS Technology

What is MEMS ?. Micro Electro Mechanical Systemsmicro scale dimensions (1mm = 1000 microns)electrical and mechanical featuressystems (features combined to perform a function)MEMS fabrication techniquesOriginally used IC (computer chip) fabrication techniques and materialsMore MEMS-specific f

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What is MEMS Technology

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    1. What is MEMS Technology?

    2. What is MEMS ? Micro Electro Mechanical Systems micro scale dimensions (1mm = 1000 microns) electrical and mechanical features systems (features combined to perform a function) MEMS fabrication techniques Originally used IC (computer chip) fabrication techniques and materials More MEMS-specific fabrication techniques and materials are now in use MEMS is an enabling technology Smaller device size Batch processing for low cost, uniform production Distributed device placement More precise sensing

    3. Why is MEMS useful? Sensors and Actuators - two classes of MEMS Sensors - measure the environment SMALL => interfere less with the environment it is measuring SMALL => redundancy, batch fabricated, … Actuators - perform work on the environment SMALL => small motion but very precise SMALL => can be placed in small spaces

    4. How are MEMS made? Surface Micromachining - additive process (2-D) Create device by adding materials on top of a wafer Easily mixed with IC fabrication techniques Limited to film thickness less than 4 microns (human hair 50-75 microns, IC gate ~ 0.15 microns) Typically used for high volume, low precision, low cost devices

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