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Visible‐light Emitting Tantalum‐oxide Films Produced by Radio‐frequency Sputtering

P29. 5 th International Conference on Advanced Micro‐Device Engineering ( AMDE 2013 ). Kenta Miura, Kazusa Kano, Genjoh Fusegi, Mayank Kumar Singh, and Osamu Hanaizumi. Visible‐light Emitting Tantalum‐oxide Films Produced by Radio‐frequency Sputtering.

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Visible‐light Emitting Tantalum‐oxide Films Produced by Radio‐frequency Sputtering

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  1. P29 5th International Conference on Advanced Micro‐Device Engineering (AMDE 2013) Kenta Miura, Kazusa Kano, Genjoh Fusegi, Mayank Kumar Singh, and Osamu Hanaizumi Visible‐light Emitting Tantalum‐oxide FilmsProduced by Radio‐frequency Sputtering Graduate School of Engineering, Gunma University, JAPAN The peak wavelength was around 500 nm. Usually, tantalum oxide doesn’t emit visible light. Point of this work We first observed green‐light emissionfrom sputtered tantalum oxide thin films after annealing. Previous works Red‐ or blue‐light emission

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