Hexin Wang, China Innovation and R&D Center, Carl Zeiss Shanghai Shenzhen , 9/5/2013

1. China International Optoelectronic Conference 2013 （CIOEC）China International Advanced Optical Manufacturing & Precision Engineering Forum 2013 Optical Testing Technology Session Light – a testing all-rounder demonstrated with advanced application examples Hexin Wang, China Innovation and R&D Center, Carl Zeiss Shanghai Shenzhen, 9/5/2013

2. Agenda 1 Introduction 2 Examples • Interferometer - Extremely persistent engineering • Light Sheet – Success of knowledge transfer • OCT – Diversity of applications 3 Discussions

3. Light – a testing all-rounder demonstrated with advanced application examples

4. Light – a testing all-rounder demonstrated with advanced application examples  20 July 1969 The most advanced interferometer in the production could be used to measure the profile depth of about 0,5 nm (rms) of a shoe sole! In other words, if we enlarge a shoe to a length which is equal to the distance between the earth and moon (about 384,403 km), a profile depth of about 0,50 m of such a shoe sole could be measured!

5. Agenda 1 Introduction 2 Examples • Interferometer - Extremely persistent engineering • Light Sheet – Success of knowledge transfer • OCT – Diversity of applications 3 Discussions

6. Interferometry is the central tool of optical metrology

7. Basic principle of interferometry • One Newton fringe is equivalent to • a distancechange of λ/2

8. Basic principle of interferometry • Nature of Newton fringes for different surfaces with reference to a standard flat

9. Basic task of digital fringeanalysis • Fringe analysis: Development of algorithms • to calculate surface deviations from interferograms

10. Basic principle of Fizeau Interferometers • Fizeau Interferometers are the workhorse in optical metrology

11. Fizeau interferometers Beamsplitter Test piece Beam expander Fizeaulens Laser Cavity CCD camera

12. Carl Zeiss interferometer DIRECT 100 Transmission sphere APLANAR Fizeauplate Cavity • More flexibility • Enabling of multi-fringetechnique

13. Carl Zeiss interferometer DIRECT 100 l/4 plate Polarizing beamsplitter • Better light efficiency • Suppression of residual reflections

14. Carl Zeiss interferometer DIRECT 100 Rotating wedge Reduction of coherentnoise

15. Carl Zeiss interferometer DIRECT 100 DMI : DirectMeasuringInterferometry Video pipelineprocessing Reference store 3x3 convolution Sine Frame store Look-up table Arctan Minus Accumulation store 3x3 convolution Cosine

16. Carl Zeiss interferometer DIRECT 100 Verticaltesttower arrangements Transmission spheres APLANAR

17. Carl Zeiss interferometer DIRECT 100Controlsoftware

18. Carl Zeiss interferometer DIRECT 100Repeatability RMS of wavefrontrepeatabilityasfunction of cavitylengthfor 2 different temperaturefluctuationsand 2 different airpressures

19. Carl Zeiss interferometer DIRECT 100Repeatabilityin productionenvironment Repeatibility 0.2 ... 0.6 nm RMS

20. Carl Zeiss interferometer DIRECT 100Reproducibilityin productionenvironment Reproducibility 0.5 ... 1.0 nm RMS

21. - Wavefront error of calibration surface Measured wavefront of total setup - FE wavefront of calibration surface Carl Zeiss interferometer DIRECT 100Calibrationprocess Actualcalibrationwavefront

22. Carl Zeiss interferometer DIRECT 100Accuracyin productionenvironment Accuracy 0.7 ... 1.5 nm RMS

23. Carl Zeiss interferometer DIRECT 100 Conclusions • Visual interferometry : Resolution /10 • Digital interferometry : Resolution /1000 ... /10000 • Repeatability : Main limitationsby • temperaturefluctuations • coherentnoise • Reproducibility : Main limitationsby • handling • Accuracy : Main limitations by • calibration process

24. Agenda 1 Introduction 2 Examples • Interferometer - Extremely persistent engineering – Leading/enabling technology in the production environment • Light Sheet – Success of knowledge transfer • OCT – Diversity of applications 3 Discussions

25. Light sheetApplicationdemonstrated in themovie http://www.youtube.com/watch?v=mr834Cs9ncs

26. Light sheetMaturetechnologyused in themetrology

27. Light sheetLight Sheet Microscopyfor Multiview Imaging of Large Specimens • Optical sectioning while minimizing photodamage • Very sensitive fluorescence detection • Image acquisition rate as fast as possible • Imaging large volumes with high resolution and contrast http://www.cell.com/cell_picture_show-lightsheet

28. Light sheetLight Sheet Microscopyfor Multiview Imaging of Large Specimens • Applications • Embryogenesis of Drosophila, Zebrafishand other model organisms • Cellular dynamics in embryos and small organisms • Structural imaging of larger (µm-mm) organisms C. Staber, J. Zeitlinger, StowersInstitute for Medical Research, Kansas City, USA

29. Light sheetZ.1 by Carl Zeiss - Innovation More Images. Gentle. Fast.

30. Light sheetZ.1 by Carl Zeiss - Innovation http://www.cell.com/cell_picture_show-lightsheet2#iit=

31. Light sheet (LS)Examples of imaging done with LS Microscopy based systems Gutiérrez-Heredia Luis et al, Light Sheet Fluorescence Microscopy: beyond the flatlands Current Microscopy Contributions to Advances in Science and Technology (A. Méndez-Vilas, Ed.), 2012

32. Agenda 1 Introduction 2 Examples • Interferometer - Extremely persistent engineering – Leading/enabling technology in the production environment • Light Sheet – Success of knowledge transfer - Innovation • OCT – Diversity of applications 3 Discussions

33. What is OCT? “Optical equivalent Ultrasound” OCT imaging is performed by measuring the echo time delay of light back reflected/scattered in tissue • Near infrared light(800-1300nm) • micrometer resolution • millimeter penetration depth • Non-contact and high speed

34. OCTHow does it work? OCT is a non-invasive, sub-surface imaging technique capable of providing high resolution cross sectional images of biological tissues such as retina. OCT empowers you with the details of “What lies beneath the fundus image?” Optic Nerve Head Ref Mirror Retina Ophthalmic Lens XY Scanner SLD Detector Display & Report generation Processing & Analysis Macular B-scan (Temporal  Nasal)

35. Stratus OCT™ Time Domain OCT & Spectral Domain OCT Reference Mirror Reference Mirror Light Source Light Source Eye Eye Spectrometer Single Detector Cirrus (3rd generation) Spectral-Domain OCT Stratus(1st generation) Time-Domain OCT Faster speed Higher definition

36. Ophthalmology Standard clinical tool in eye imaging guided surgery and diagnose from anterior corneal segment to posterior eye disease, such as AMD\Glaucoma\Diabetic Retinopathy Cardiology Ongoing development as an intravascular imaging tool for coronary plaques and stent, visualization for lesion assessment, treatment and follow-up strategies Oncology Great potential as an optical biopsy tool for detection of many cancer tissues such as skin, esophagus etc. … OCTDiverse applications in clinical practice

37. Agenda 1 Introduction 2 Examples • Interferometer - Extremely persistent engineering – Leading/enabling technology in the production environment • Light Sheet – Success of knowledge transfer -Innovation • OCT – Diversity of applications - More innovation 3 Discussions

38. Discussions • Interferometer - Extremely persistent engineering=> Leading/enabling technology in the production environment • Light Sheet – Success of knowledge transfer => Innovation • OCT – Diversity of applications => More innovation, even disruptive! Thanks to my colleagues: Mr. Bernd Dörband, Mr. Bu Peng, Mr. Jörg Mütze forsharingslides!

40. Carl Zeiss Group: Our portfolio is focused on high-techThe overarching ZEISS brand stands … … for customer focus, innovation and reliability Strategic Business Units Industrial Metrology Semiconductor Manufacturing Technology Microscopy €495 million in revenue 2,239 employees €967 million in revenue 2,636 employees €650 million in revenue 2,801 employees Vision Care CameraLenses, Sports Optics, Planetariums Medical Technology €860 million in revenue 9,586 employees €178 million in revenue 767 employees €984 million in revenue 3,450 employees Financial Highlights for FY 2011/12