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Side View

Beginning from a silicon wafer. Side View. Top View. Thermal Oxidation. Side View. Top View. Spin-on Photo Resist (PR). Side View. Top View. Alignment, UV Expose and Develop Photo Resist (PR). Side View. Top View. Oxide Etched. Side View. Top View. Remove Photo Resist (PR).

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Side View

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  1. Beginning from a silicon wafer Side View Top View

  2. Thermal Oxidation Side View Top View

  3. Spin-on Photo Resist (PR) Side View Top View

  4. Alignment, UV Expose and Develop Photo Resist (PR) Side View Top View

  5. Oxide Etched Side View Top View

  6. Remove Photo Resist (PR) Side View Top View

  7. Doping (implantation or diffusion) Side View Top View

  8. Grow Field Oxide (wet/dry) and dopant diffusion Side View Top View

  9. Spin-on Photo Resist (PR) Side View Top View

  10. Alignment, UV Expose and Develop Photo Resist (PR) Side View Top View

  11. Oxide Etched Side View Top View

  12. Remove Photo Resist (PR) Side View Top View

  13. Grow Gate Oxide (dry) Side View Top View

  14. Spin-on Photo Resist (PR) Side View Top View

  15. Alignment, UV Expose and Develop Photo Resist (PR) Side View Top View

  16. Field Oxide Etched Side View Top View

  17. Field Oxide Etched Side View Top View

  18. Metal (e.g., Aluminum) deposition Side View Top View

  19. Spin-on Photo Resist (PR) Side View Top View

  20. Alignment, UV Expose and Develop Photo Resist (PR) Side View Top View

  21. Aluminum Etched Side View Top View

  22. Remove Photo Resist (PR), annealing - complete Side View Top View

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