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Micro-mirror

Micro-mirror. Micromechatronics System FH AACHEN University of Applied Science. Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras Ramanathan Swaminathan Spandan Shroff. 10 -10-2011. Advantage of MEMS Spectrometer over conventional . small size low cost,

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Micro-mirror

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  1. Micro-mirror Micromechatronics System FH AACHEN University of Applied Science Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras RamanathanSwaminathan SpandanShroff 10-10-2011

  2. Advantage of MEMS Spectrometer over conventional small size low cost, fast response – filter unwanted wavelengths high signal to noise ratio reduced complexity and low power consumption

  3. Key features of micromirror array a 100% fill-factor minimum surface roughness and high reflectivity (ideally 100%) in the wavelength range of interest zero insertion loss zero noise simple control identical deflection versus input energy response

  4. A unique application of micromachined mirrors can be performance enhancement of a spectrometer by selectively focusing a particular spectral component on a detector thereby reducing the number of detectors required. improves the signal to noise ratio of the spectrometer device

  5. IR Range Spectrometer Sensors andActuators

  6. Diffraction grating Sensors andActuators

  7. Portable Universial Spectrometer Small mirror – reducing bandpass - higher resolution But low light intensity Variable band pass filter

  8. Fabrication polysilicon (poly-Si) and gold micromirroris fabricated by a surface -micromachining process Drawback: residual stress Result: curvature of the mirror surface which results in high insertion loss and crosstalk So monocrystallinesilicon best results and closely resembles an ideal reflector surface. Sensors andActuators

  9. Question The proposal is workable? Mirror size? Sensors andActuators

  10. 1 dimension array micro mirror Sensors andActuators

  11. Sensors andActuators

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