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ELECTRICAL AND ELECTROMECHANICAL CHARACTERISTICS OF NANOASSEMBLED CARBON NANOTUBE THIN FILM RESISTORS ON FLEXIBLE SUBSTRATES Wei Xue and Tianhong Cui Department of Mechanical Engineering, University of Minnesota, Minneapolis, USA Transducers’07. Speaker: Wen-Fan Liao ID:g946220. Outline.
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ELECTRICAL AND ELECTROMECHANICAL CHARACTERISTICS OF NANOASSEMBLEDCARBON NANOTUBE THIN FILM RESISTORS ON FLEXIBLE SUBSTRATESWei Xue and Tianhong CuiDepartment of Mechanical Engineering, University of Minnesota, Minneapolis, USATransducers’07 Speaker: Wen-Fan Liao ID:g946220
Outline • Introduction • Experiments • Device Characteristics • Conclusion • References
Introduction • This paper report the fabrication of single-walled carbon nanotube (SWNT) thin-film on plastic substrates with layer-by-layer self-assembly • assemble SWNTs on flexible substrates and explore the properties of the SWNT thin films which are built with alternating layers of SWNTs and PDDA
Experiments Polyelectrolytes(+) CNTs(-) naonoparticles Ref : T Cui and W Xue, “Assembling three-dimensional carbon nanotube-based cantilever arrays,” SPIE Newsroom 2007 Layer-by-layer self-assembly of polyelectrolytes/CNTs and polyelectrolytes/nanoparticles
Experiments (PDDA/PSS)2 (PDDA/SWNT)n • (a) Structure of self-assembled SWNT multilayer thin film • (b) SEM image of assembled SWNTs Ref : W Xue and T Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films” IEEE NEMS 2007 1μm
Experiments • Schematic structure of a SWNT thin-film resistor built on a flexible substrate Cr/Au Ref : W Xue and T Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films” IEEE NEMS 2007
Experiments • (a) Flexed transparency film with prepatterned electrodes • (b) Transparency coated with 5 layers of SWNTs
Experiments • 4156A Precision Semiconductor Parameter Analyzer • up to four probes • Measurements include I-V curve, Id-Vg graphs, etc Ref : http://www.ee.byu.edu/cleanroom/HP4156A.phtml
Device Characteristics 6.37MΩ • Characteristics of SWNT thin-film resistors on flexible substrates 0.37MΩ 0.30MΩ 0.21MΩ 0.14MΩ R10 =6.37 MΩ R0 =1.35 MΩ Rn =(R0×R10)/[R0+(n-10) ×R10]
Device Characteristics • Resistance versus mechanical deformation of SWNT thin-film resistors G14 = △R14/R14 = 38.2% G16 = △R16/R16 = 47.1%
Device Characteristics • Schematic models for axial deformation of SWNT on different topographies
Conclusion • demonstrated the fabrication and characterization of SWNT multilayer thin films on flexible substrates • MEMS/NEMS devices such as pressure sensors, accelerometers, and magnetic sensors have the potential to be developed and fabricated
References • Wei Xue and Tianhong Cui, “Electrical and electromechanical characteristics of nano-assembled carbon nanotube thin film resistors on flexible substrates,” Transducers’07, Lyon, France, June 2007 • Wei Xue and Tianhong Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films,” IEEE NEMS 2007, Bangkok, Thailand, pp. 371-376, January 2007 • Tianhong Cui and Wei Xue, “Assembling three-dimensional carbon nanotube-based cantilever arrays,” The International Society for Optical Engineering - SPIE Newsroom - Micro/Nano Lithography & Fabrication, http://spie.org/x17490.xml, DOI: 10.1117/2.1200710.0901, 2007 • http://www.ee.byu.edu/cleanroom/HP4156A.phtml
