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Complete view of mirror structure (layout dimensions*)

Complete view of mirror structure (layout dimensions*) *Except, I’m showing 400 fingers instead of 1000 fingers for a faster display speed. The matrix size of this particular rendition is 5226 x 5226. It took 1 minute to load & display. If I remove the fingers the display takes 2 seconds.

keegan
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Complete view of mirror structure (layout dimensions*)

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  1. Complete view of mirror structure (layout dimensions*) *Except, I’m showing 400 fingers instead of 1000 fingers for a faster display speed. The matrix size of this particular rendition is 5226 x 5226. It took 1 minute to load & display. If I remove the fingers the display takes 2 seconds. Since I’m using subnets, the main netlist consists of ONLY 3 lines of netlist code 

  2. Close-up of hinges.

  3. First results: For an effective combdrive actuation I just applied 2 external forces of 1000uN each on each combdrive. Process file has Young’s modulus of 185GPa, Bond layer thickness = 3um Thick layer thickness = 40um Thin layer thickness = 3um Therefore, for the center ring node I get the following (the first slide shows axes) Rotation about x = -0.0209 deg Rotation about y = 0.2406 deg  This should be optimized for rotation, right? Rotation about z = -0.2075 deg Translation about x = 1.5348e-017 m Translation about y = 1.3030e-019 m Translation about z = 6.0220e-018 m

  4. Exaggerated views, where F = 100*F Front view. Looking along x Top view. Looking along z Side view. Looking along y Right hinge close-up Diagonal view from top.

  5. spy(K-dFdx)

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