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Experimental Work - Atom Probe Tomography At Iowa State University

Experimental Work - Atom Probe Tomography At Iowa State University . S. Dumpala , S. Broderick, A. Bryden , K. Kaluskar and K. Rajan. Study of Growth of Different Oxidized Layers : APT. Atom Probe Tomography (Model System – Oxidation of Aluminum). ReaxFF Simulations.

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Experimental Work - Atom Probe Tomography At Iowa State University

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  1. Experimental Work - Atom Probe Tomography At Iowa State University S. Dumpala, S. Broderick, A. Bryden, K. Kaluskar and K. Rajan

  2. Study of Growth of Different Oxidized Layers : APT Atom Probe Tomography (Model System – Oxidation of Aluminum) ReaxFF Simulations • Oxidation of Aluminum at 450 C, 2.5 x 10-3Torr for 10 min. • Chemical composition and atomic structure from 3D image of elemental mapping with atomic-scale resolution U. Khaliov, et al. J. Phys. Chem.C, 115, 2011 • Growth behavior of ultrathin silica layers by laser detonation hyperthermal atomic beam source (1-15 eV) of atomic and molecular oxygen • Study of occurrence of pure Si, SiOx, • and SiO2 and growth directions of oxidized (black arrows) and silica layers (red arrows)

  3. Study of Interfaces Mass and Charge distributions – ReaxFF Simulations Diffusion Profiles - APT Bulk Al2O3 phase Bulk Al phase O Al Possible Link O Al U. Khaliov, et al. J. Phys. Chem.C, 115, 2011

  4. Effect of Growth Temperature APT ReaxFF Simulations U. Khaliov, et al. J. Phys. Chem.C, 116, 2012 Environmental Chamber- APT Possible Experimental Studies - Oxidation • Different Temperatures up to 800 C • Different pressures ranges (low 10 -5 torr) • Different gas phase chemistries • Different time scales • Different sample orientations

  5. Mass Spectra - APT

  6. Study of Interfaces Diffusion Profiles Ion Evaporation Map Use APT to study compound formation, bond strengths (crystal structure changes), evaporation physics/ionic dissociation, and charge states of bonded atoms.

  7. Experimental Studies at Maryland • 10 coupons each with 36 Si (100) micro tips (6x6 rows) were sent to University of Marylandto obtain the samples of known fluence and energy spectrum to evaluate the change in surface morphology Typical Silicon Coupon

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