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The Basic Concept of the Gas Filter

The Basic Concept of the Gas Filter. 技術研討資料. 主講人 : 龍仁生. How do gas filters work ? Basic requirements of gas filter Filter material comparison Filter lifetime recommendation Case study How to choose a suitable filter ? Filter technology trend Summary. Content.

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The Basic Concept of the Gas Filter

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  1. The Basic Concept of the Gas Filter 技術研討資料 主講人 : 龍仁生

  2. How do gas filters work ? • Basic requirements of gas filter • Filter material comparison • Filter lifetime recommendation • Case study • How to choose a suitable filter ? • Filter technology trend • Summary Content Mykrolis 台灣分公司‧微電子事業處

  3. How do Gas Filters Work • Particle capture mechanisms • Impaction • Interception • Diffusion • Electrostatic • MPPS (Most Penetrating Particle Size) • Nature of gas Mykrolis 台灣分公司‧微電子事業處

  4. How do Gas Filters Work MILLIPORE Mykrolis 台灣分公司‧微電子事業處

  5. Capture by Interception -2 10 -4 10 Capture by Diffusion -6 10 Combines Capture by Interception and Diffusion -8 10 -10 10 -12 10 -14 10 -16 10 Most Penetrating Particle Size at 50 cm sec. -18 10 -20 10 -22 10 -24 10 -26 10 -28 10 .01 .02 .03 .06 .1 .2 .3 Particle Diameter, m • Theoretical Plot illustrating the Most Penetrating Particle Size Concept Mykrolis 台灣分公司‧微電子事業處 Fractional Penetration

  6. Particle Capture on Nickel Membrane MILLIPORE Mykrolis 台灣分公司‧微電子事業處

  7. Log Reduction Value Mykrolis 台灣分公司‧微電子事業處 • LRV = Log10 (inlet Cp / outlet Cp) • Example: • Inlet Cp = 1 x 10^6 particles / ft3 • Outlet Cp = 1 particle / ft3 • LRV = 6 • 99.9999% efficient • fractional penetration = 1 x10^-6

  8. High retention- The ability to retain all particles,down to the smallest size. • Downstream cleanliness- The ability not to add anything ( particles or volatiles (moisture, others))to the gas stream. • High corrosion resistance- The ability to withstand in a corrosive environment. • Fast gas displacement- The ability to displace gas quickly. Basic requirements of gas filter Mykrolis 台灣分公司‧微電子事業處

  9. Filter Membrane Comparison Mykrolis 台灣分公司‧微電子事業處

  10. Filters Lifetime Recommendation • Specialty Gas (Cl2, HBr, SiH4, DCS…) < 2 Years • Inert Gas (N2, H2, O2, He…) < 5 Years Mykrolis 台灣分公司‧微電子事業處

  11. No.2 Upstream SEM and EDS • No.1 Upstream SEM and EDS Mykrolis 台灣分公司‧微電子事業處

  12. No.1 downstream SEM and EDS • No.2 downstream SEM and EDS Mykrolis 台灣分公司‧微電子事業處

  13. No.2 Housing SEM and EDS (corroded) • No.1 Housing SEM and EDS (corroded) Mykrolis 台灣分公司‧微電子事業處

  14. How to Choose a Suitable Filter • Compatibility (Corrosive / Inert) Corrosive: Ni / PTFE Inert : Ni / PTFE / SS • Retention Ni / PTFE > SS • Gas flow rate in need • Considering Inlet pressure • Fitting (VCR, Swaglok, Butt weld, IGS(Surface Mount)) Mykrolis 台灣分公司‧微電子事業處

  15. Filter Technology Trend • Improve Process uptime & Wafer defects. • Overall Process control: Particles, Moisture, Oxygen,Impurity…etc. • Our best suggestion is both of Filter & Purifier can improve process uptime & overcome wafer defects. Mykrolis 台灣分公司‧微電子事業處

  16. The Role of Purifier • Purifier play a role of remove impurities (Oxygen, Moisture,CO2…etc) • Moisture is one factor cause corrosion on component & piping to process chamber.(Especially, Corrosive gas) • Moisture & Impurity can affect the process uptime & wafer defects. Mykrolis 台灣分公司‧微電子事業處

  17. Summary • Gas filter key filtrate mechanism : diffusion & interception • Cleanliness becomes most important • All-Metal gas filters are the technology trend • Routine filter change out is the key to high quality particle performance • Purifier can enhance gas filter performance and lifetime Mykrolis 台灣分公司‧微電子事業處

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