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Scanning electron microscope(SEM)- 掃描式電子顯微鏡

Scanning electron microscope(SEM)- 掃描式電子顯微鏡. Adviser : KUN-SIAN WU Reporter: CHIN-TUNG CHU. 2013/12/24. O utline. Introduction Principle & Structure Application Comparison Conclusion References. Introduction. Introduction. 圖片來源 : 南台科技大學 FE-SEM 實驗室. Introduction. Max Knoll.

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Scanning electron microscope(SEM)- 掃描式電子顯微鏡

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  1. Scanning electron microscope(SEM)-掃描式電子顯微鏡 Adviser : KUN-SIAN WU Reporter: CHIN-TUNG CHU 2013/12/24

  2. Outline • Introduction • Principle & Structure • Application • Comparison • Conclusion • References

  3. Introduction

  4. Introduction 圖片來源: 南台科技大學 FE-SEM實驗室

  5. Introduction Max Knoll Sir Joseph Thomson Ernst Ruska Manfred von Ardenne (Zworykin)

  6. Structure

  7. Structure • Vacuum system(真空系統) • Mechanical pump(機械泵)、Oil diffusion pump(油擴散泵)、Turbo molecular pumps(渦輪分子泵). • Electron beam system(電子束系統) • Electron beam gun(電子槍)-Field emission(場發射)、Wolfram(鎢)、Lanthanum exaboride(六硼化鑭). • Electromagnetic lens(電磁透鏡) • Imaging system(成像系統) • Secondary electron(次級電子)、Back-scattered electron wireless(背散無線電子)、Auger electron(歐傑電子)、X-ray

  8. Structure 圖片來源: 南台科技大學 FE-SEM及奈米材料及電子實驗室

  9. Principle

  10. Principle Electron beam gun Bunching mirror system Sample X-ray and electorn Imaging in CRT/LCD Electron beam gun (high voltage) The first Bunching mirror The Second Bunching mirror Objective X-ray detectors Sample room Vacuum pump system (diffusion or Turbo molecular) Electronic control and imaging system : Reflection electron、Secondary electron、Sample current Amplifier Selector Switch、Video enlarge、CRT、camera Zoom controller、Scan generator

  11. Application

  12. Application 圖片來源: 南台科技大學 奈米材料及電子實驗室

  13. Comparison

  14. Comparison • SEM: reflected by the incident electron. • 電子束經樣品反射 • AFM: Van Der Waals Force • 原子間的凡得瓦力 • Measurement needs in vacuum. • 需要在真空中量測 • Samples must be conductive. • 樣品須為導電材質 • Need gold, platinum if the material is not conductive. • 若材料不導電,需鍍上金或白金 • Samples can not be a powder or a volatile items. • 樣品不能是粉末或揮發性物品 圖片來源: 南台科技大學 奈米材料及電子實驗室

  15. Conclusion • 掃描式電子顯微鏡(SEM)雖然有真空下測量、樣品需導電及樣品不能為粉末等缺點,但其電子槍壽命可使用許久,相較於原子力顯微鏡(AFM)的探針,確實是有優勢,而且樣品準備上也很簡單,在科學研究上還是有一定的地位存在。

  16. References • 維基百科,SEM、AFM • 南台科技大學,碩士論文,莊凱揚 • 南台科技大學,碩士論文,許宏全 • 南台科技大學,FE-SEM實驗室,奈米材料及電子研究室 • SEM可使用地點: 南台科技大學、成功大學、國家奈米實驗室、中山大學

  17. Thanks for your attention !

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