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Langmuir Probe

Langmuir Probe. “. Plasma parameter measuring system. Talk Outline. Current as a function of Voltage and first derivative of current / voltage Measuring electron temperature ( Kte ) Measuring ( I isat ) and ( I esat ) Measuring Saturation Ion current

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Langmuir Probe

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  1. Langmuir Probe “ Plasma parameter measuring system

  2. Talk Outline • Current as a function of Voltage and first derivative of current / voltage • Measuring electron temperature (Kte) • Measuring (Iisat) and (Iesat) • Measuring Saturation Ion current • Current (I) as a function of Voltage (V), and first derivative of I/V • Clean IV Curve in Chlorine • Clean EEDF Curve in Chlorine

  3. Current as a Function of Voltage and First Derivative of Current / Voltage

  4. -4.00E+00 2 3 4 5 6 7 8 9 -4.50E+00 -5.00E+00 -5.50E+00 y = 0.3774x - 8.5523 -6.00E+00 2 R = 0.9987 -6.50E+00 -7.00E+00 -7.50E+00 -8.00E+00 Measuring Electron Temperature (kTe) Probe Bias (Volts) Natural Log (Current) (Amps) kTe = 3.2 eV

  5. Measuring (Iisat) and (Iesat) Measuring Ion Current at Plasma Potential (Vp) (Iisat) Ni= 1.21 1016 m-3 Electron Current at Plasma Potential (Vp) (Iesat) Ne = 1.03 1016 m-3

  6. Measuring Saturation Ion Current

  7. Current (I) as a function of Voltage (V), and first derivative of I/V Clean data in industrial reactor driven by RF frequency Reactor Type: PlamaLab 100 Gas: Argon Pressure: 20mTorr Frequency: 13.56MHz

  8. Clean IV Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

  9. Clean EEDF Curve in Chlorine Clean data in industrial reactor driven by RF frequency and reactive gas showing a Maxwellian distribution Reactor Type: PlamaLab 100 Gas: Chlorine Pressure: 20mTorr Frequency: 13.56MHz

  10. Summary Describing a Langmuir Trace Measuring plasma parameters and saturation points Research and industrial applications using reactive gases

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