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Microfabrication of 100 GHz Test Structures

Microfabrication of 100 GHz Test Structures. Corning Glass Cover Slips: $0.12 each. New lithographic mask was designed in order to have the frequency response shifted to the band around 100 GHz. ε glass (@100 GHz)= 6.5.

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Microfabrication of 100 GHz Test Structures

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  1. Microfabrication of 100 GHz Test Structures Corning Glass Cover Slips: $0.12 each New lithographic mask was designed in order to have the frequency response shifted to the band around 100 GHz. εglass (@100 GHz)= 6.5 Microscope cover slides were chosen as substrate due to low cost and appropriate geometry. Slide thickness is around 250 μm, slide area is 22 mm x 22 mm.

  2. Exact Geometry of Features on the 100 GHz Mask • The following dimensions were calculated using: • Target frequency: 100 GHz. • Previous design (12 GHz) dimensions. • Substrate relative permittivity (6.5) at target frequency.

  3. Exact Geometry of Features on the 100 GHz Mask

  4. Array area: 15 mm x 15 mm Array: 33 x 33 Alignment - 1: Array to Glass (during Fabrication) Alignment - 2: Glass to Glass (Stacking) (during Measurement)

  5. Fabricated Structures • Fabrication at Microelectronics Facility of FORTH, Heraklion. • With Dr. George Konstantinidis. • Method: Image Reversal Lithography(AZ5214) / E-Gun Metal Deposition (5000Å Ag) / Lift-Off

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