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Interpretation of Gas Delivery Diagrams

Interpretation of Gas Delivery Diagrams. Gas delivery diagram symbols—gas panel 1 right side. Gas delivery diagram interpretation—gas panel 3. Pump. Gas delivery diagram interpretation—gas panel 2. Chamber. First work out the I/Os; Then work out the main p rocess gas flow route

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Interpretation of Gas Delivery Diagrams

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  1. Interpretation of Gas Delivery Diagrams

  2. Gas delivery diagram symbols—gas panel 1 right side

  3. Gas delivery diagram interpretation—gas panel 3

  4. Pump Gas delivery diagram interpretation—gas panel 2 Chamber First work out the I/Os; Then work out the main process gas flow route including the choking valves; See next slide for results

  5. Process chamber V5 PSH3 Gas 2 supply Gas4 supply MFC 2 MFC 4 V4 V20 V40 V22 V42 Hand valve Hand valve Gas delivery diagram interpretation

  6. Pump Gas delivery diagram interpretation—gas panel 2 Chamber Now we will deal with the side branches. But we will Map it out more symmetrically Around the I/Os. See next Slide

  7. pump N2 PSH2 V85 PSH9 V2 V3 V4 V1 V42 V41 MFC outlet inlet Gas delivery diagram interpretation—gas panel 2 Forward purging: V4 and V1 open, V41, V42 open, all others closed. Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valve—dummy load for the pump when chamber iso valve is closed.

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