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ITRS Conference 2002 July 24, 2002 San Francisco, California

ITRS Conference 2002 July 24, 2002 San Francisco, California. ITRS 2002 Environmental, Safety and Health Update. Shinya Hashimoto - NEC Jim Jewett - Intel. KEY CHANGES FOR 2002. Most Table requirements for 2002 remain unchanged from 2001 ITRS Climate Change requirements tightened

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ITRS Conference 2002 July 24, 2002 San Francisco, California

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  1. ITRS Conference 2002July 24, 2002 San Francisco, California ITRS 2002 Environmental, Safety and Health Update Shinya Hashimoto - NEC Jim Jewett - Intel

  2. KEY CHANGES FOR 2002 • Most Table requirements for 2002 remain unchanged from 2001 ITRS • Climate Change requirements tightened • More aggressive challenge to meet PFC emissions reduction goal • New or tighter targets for CVD and Etch Process • PFOS-based materials restrictions identified and non-PFOS EUV resist development added • ESH Impact assessments modified to eliminate “acceptable risk”

  3. Table 85a Climate Change Mitigation Technology Requirements—Near-term

  4. Table 85b Climate Change Mitigation Technology Requirements—Long-term

  5. Table 84a Chemicals, Materials and Equipment Management Technology Requirements—Near-term

  6. Table 83a ESH Intrinsic Requirements—Near-term

  7. REVISIONS for 2003 • Introduce reference table for materials having potential for restricted use • Revise resource conservation categorizaton for water • Develop numeric requirements and/or methodologies for determining “optimize, minimize, reduce, efficiency” requirements • Revisit concept of ESH assessment to look at broader scope • Update “technology mapping” with key thrusts for alignment of ESH requirements

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