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The Ultimate Semiconductor Process and Machine Enhancement Tool

Tadi Guard. The Ultimate Semiconductor Process and Machine Enhancement Tool Specific TadiGuard MRC-Eclipse Information. Typical TadiGuard Eclipse Real-time Alarms:. All stations: Pod Pressure (Throttle valves failure). Skipped Index (Skipped station, no process).

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The Ultimate Semiconductor Process and Machine Enhancement Tool

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  1. TadiGuard The Ultimate Semiconductor Process and Machine Enhancement Tool Specific TadiGuard MRC-Eclipse Information Tadin Tal Advanced Instruments Ltd. www.tadin.com

  2. Typical TadiGuard Eclipse Real-time Alarms: All stations: Pod Pressure (Throttle valves failure) Skipped Index (Skipped station, no process) Missing Index (No rotation, double–process) Etch: Forward Power, Reflected Power, Bias All targets: Current, Voltage Base Pressure (Ion Gauges) Wafer handling Many more Tadin Tal Advanced Instruments Ltd. www.tadin.com

  3. TadiGuard’s most prominent contribution is its real-time watchdog features that cuts scrap, rework, maintenance, tests, test wafers, material, calibration, etc. With overall reduced Cost Of Ownership Next, see typical TadiGuard Eclipse analysis screens Tadin Tal Advanced Instruments Ltd. www.tadin.com

  4. Sput :1 typical Pod Pressure, Voltage, Current, Date, Time, Recipe, Lot# Tadin Tal Advanced Instruments Ltd. www.tadin.com

  5. Sput :2 typical Pod Pressure, Voltage, Current, Date, Time, Recipe, Lot# Tadin Tal Advanced Instruments Ltd. www.tadin.com

  6. Sput :3 typical Pod Pressure, Voltage, Current, Date, Time, Recipe, Lot# Tadin Tal Advanced Instruments Ltd. www.tadin.com

  7. Sput 1 Voltage / Current / Pod Press overlay (waterfall) Tadin Tal Advanced Instruments Ltd. www.tadin.com

  8. Sput 3 Voltage trend, SPC X-chart. Number of wafers: 9934 Tadin Tal Advanced Instruments Ltd. www.tadin.com

  9. Sput 1 Volts, Current, Pod-Pressure X-Y-Z Correlation Tadin Tal Advanced Instruments Ltd. www.tadin.com

  10. Sput 1 Plasma Impedance calculated as V/I Tadin Tal Advanced Instruments Ltd. www.tadin.com

  11. Sput 3 voltage trend: Note target changes at pre-set voltage level. Number of wafers: 9934 Tadin Tal Advanced Instruments Ltd. www.tadin.com

  12. Sput 1 Power, W, Lot#, Recipe over 12 Hours, 373 Wafers. Tadin Tal Advanced Instruments Ltd. www.tadin.com

  13. Sput 1 Current trend, 14796 wafers Tadin Tal Advanced Instruments Ltd. www.tadin.com

  14. Correlation graph of Sput1 #1 Volts Vs. Current (745 wafers). Tadin Tal Advanced Instruments Ltd. www.tadin.com

  15. Sput 1 Current and Voltage long-term (3 months) trend, with target changes. Tadin Tal Advanced Instruments Ltd. www.tadin.com

  16. Sput 2 Current and Voltage, Target change and 39 conditioning wafers Tadin Tal Advanced Instruments Ltd. www.tadin.com

  17. Sputter machine performance and capacity measurements: Average 33.491 wafers per hour. Tadin Tal Advanced Instruments Ltd. www.tadin.com

  18. Sputter Etch chamber pump-down curve. Tadin Tal Advanced Instruments Ltd. www.tadin.com

  19. Sputter Etch chamber measured pumping speed. Tadin Tal Advanced Instruments Ltd. www.tadin.com

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