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Thermal Energy Domain

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Thermal Energy Domain

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    1. 1 Thermal Energy Domain Could be an entire course Qualitative experience from everyday life Our concern is with rates of heat transfer

    2. 2 Why Heat Transfer in a MEMS Course? Thermal Actuators

    3. 3 Why Heat Transfer in a MEMS Course? Undesirable effects of Joule Heating

    4. 4 Why Heat Transfer in a MEMS Course? Testing material properties at high temperatures (Juan Aceros)

    5. 5 Why Heat Transfer in a MEMS Course? Testing material properties Steady-State Temperature Response

    6. Why Heat Transfer in a MEMS Course? Testing material properties Transient Temperature Response

    7. 7 Why Heat Transfer in a MEMS Course? MEMS Temperature Measurement Devices

    8. 8 Why Heat Transfer in a MEMS Course? Residual thermal stress produces a curvature

    9. 9 Why Heat Transfer in a MEMS Course? Designing and Modeling of thermal actuation and thermal processes. Sensing of a substance may require an elevated temperature. Testing material properties as a function of temperature and/or temperature variation. Issues involve: power needed, temperature uniformity, time response.

    10. 10 Modes of Heat Transfer Conduction, Radiation, Conduction will be studied first Heat transfer within a solid occurs by conduction. Also occurs in a fluid. Heat is transferred by lattice vibrations. In a metal by the flow of free electrons. Conduction can also occur in a gas due to molecular collisions

    11. MTMG260/ECEG244 11

    12. MTMG260/ECEG244 12

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    25. 25 Thermal Radiation Electromagnetic radiation Important range is for wavelengths between 0.1-100 µm.

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