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Status of Process Qualification Centers Florence , Strasbourg, Vienna

Status of Process Qualification Centers Florence , Strasbourg, Vienna. Jean-Charles Fontaine Jean-Marie Helleboid Christophe Hoffmann. Mirko Brianzi Anna Macchiolo. Thomas Bergauer Margit Oberegger. PC or MAC to control the system through Labview software.

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Status of Process Qualification Centers Florence , Strasbourg, Vienna

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  1. Status of Process Qualification CentersFlorence , Strasbourg, Vienna Jean-Charles Fontaine Jean-Marie Helleboid Christophe Hoffmann Mirko Brianzi Anna Macchiolo Thomas Bergauer Margit Oberegger Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  2. PC or MAC to control the system through Labview software System Configuration Switching matrix in K7002 main-frame Probe-card to contact the 9 test-structures Measuring Instruments Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  3. Cap-ts Sheet GCD Cap-AC Baby Cap-DC Diode Mos Mos Probe-card • After finalisation of HPK and ST mask designs we have agreed upon the positions of the probe-card 52 contacts • The same probe-card is compatible for the test-structures of both the suppliers for all the sensor-types • Contacts on the baby detector designed to align the probe-card with the probe-station chuck and the standard moon Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  4. From the probe-card to the switching matrix 4 K7154 modules of the switching matrix: 10 inputs each Flat cable from the probe-card Connection box between flat-cable and cables to the switching matrix Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  5. Measuring Instruments HV source : up to 1000 V (IV_baby) All the instrument drivers are ready and included in the common software V source: ±20 V LCR meter + decoupling box Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  6. New measurement configuration • Change of the previous measurement configuration in order to: • Make it compatible for the different instrumentation present in the three laboratories • Improve the accuracy of some measurements • Reduce the needed electronic equipment • At the moment each lab is testing the new configuration. After this phase it will be implemented in the common software Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  7. K7153: 5 input channels from the measuring instruments Switching matrix Switch System K7002 Slot 1 K7154 New configuration: Using a common Low for the HV and V sources we could remove a K7153 module from the Switching System, now available as spare Common Low (HV+V source) High HV source High V source Slot 2 k7154 In Florence we are now replacing our old multiplexersK7158 (30 V limit on input voltage) with K7154(1100 V limit) the switching system is going to be exactly the same in the 3 labs Slot3 k7154 Slot 5 K7153 Slot 4 k7154 4 outputs to the K 7154 modules Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  8. Selection of the lab Common Software Visualisation of the full set of results of the 9 measurements on a standard moon Strasbourg is now implementing the last changes in the common software Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  9. Gate Controlled Diode (A) New configuration: Common LOW for HV source and V source Florence:we had to swap HV and V source because of worse resolution of the A-meter of HV generator Surface generated current V back = 10V CSEM M200 Standard moon accumulation inversion depletion Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 V gate (V)

  10. Gate Controlled Diode(Strasbourg) OLD=HV source and V source HIGH were referred to the same potential NEW=HV source and V source LOW are referred to a common GRND Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  11. CV MOS Changed the connection between High and Low of HV source and LCR meter through the switching matrix(same for CV on diode) To MOS metal (F) HV source Vfb To back Vfb LCR Low to 0V since all the instrument GNDs are connected together LCR meter + decoupling box V gate (V) HPK M200 standard moon, similar behaviour for STM M200 Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  12. Tests of the new configuration(Strasbourg) Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  13. CV on CSEM MOS f = 100 Hz f =100 Khz Vgate (V) V gate (V) Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  14. R interstrip Measured on CAP-DC: 9 strips without bias resistor To the central strip To the first neighbouring strips Need high sensitivity of A-meter on HV source Voltage applied across the central strip and the neighbouring ones Polarisation bias to the back Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  15. IV dielectric Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  16. Still to do ... • Implement the new configuration in the final software and then test it. • Install the probe-card and complete the connection with the switching system. Test the fully automatic procedure with the probe-card. • Interface to the DB:a first draft of the output file and of the VI files to generate it was prepared in Vienna. The connection to the main acquisition software has to be implemented in Strasbourg. Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

  17. Logistic • Florence:IB1, IB2, OB1, OB2 (no-longtime IV) • from QTC Perugia and Pisa • 5% of the wafers = 693 standard moons • Strasbourg:W3, W5A, W5b, W6a, W6b • from QTC Karlsruhe • 271 standard moons • Vienna:W1, W2, W4, W7A, W7b • from QTC Vienna • 235 standard moons Anna Macchiolo,Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

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