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ALD functionalization of AAO microchannel plates

ALD functionalization of AAO microchannel plates. May 25 2010. Anil Mane, Qing Peng, Jeff Elam ALD Research Program, Process Technology Research Group Energy Systems Division. Objective: To test AAO MCPs with ALD coatings. Received 4 AAO MCPs from Synkera

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ALD functionalization of AAO microchannel plates

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  1. ALD functionalization of AAO microchannel plates May 25 2010 Anil Mane, Qing Peng, Jeff Elam ALD Research Program, Process Technology Research Group • Energy Systems Division.

  2. Objective: To test AAO MCPs with ALD coatings • Received 4 AAO MCPs from Synkera • Functionalized with resistive coating by ALD • Al:ZnO 20:80% (Targeted thickness = 50) • ANL Chemistry 1 (Targeted thickness = 100A)

  3. Photographs of AAO discs as received and with ALD coating As received AAO MCP Coated with AZO Coated with new chemistry 1 (AAO # 4483) (AAO # 4482) • Stains on one side After resistive coating Active area After Cr electrode at CNM (Active area pop-up) • Stains side shows non-uniformity and different appearance

  4. I-V plot for AAO disc (# 4484) with ALD of “new chemistry-1” • Resistance is higher than expected

  5. I-V plot for AAO disc (# 4483) with ALD of “Al:ZnO (20:80)” • Resistance is higher than expected

  6. Summary • As received AAO MCPs has stains on one side • Tested two AAO MCPs with resistive coating by ALD • Resistance is higher than expected (calculation check?) Next plan • Need clean AAO MCPs with both side similar opening • Coating penetration depth and uniformity (SEM) • Tuning workable resistance • Thermal coefficient • Workable pair for gain testing

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