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Vertical Pillars for Biological Force Sensing

This update provides an overview of the device training completed so far, including the completion of tasks such as wafer saw, amtetcher, wbgeneral, innotec, and laser ablator. The next steps involve critical point drying of thick SU-8, strain gauge resistance experiments, HF vapor investigation, characterization of a 35 um SU-8 layer, testing of the laser ablator, and wire bonding. Additionally, it congratulates Nahid on her birthday and Sarah on her recent wedding.

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Vertical Pillars for Biological Force Sensing

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  1. Vertical Pillars for Biological Force Sensing Sarah Coulthard, Nahid Harjee, Nathan Klejwa, Ronald Kwon Class update – July 20th

  2. Device Overview

  3. Training • Completed: • MERL clean shop: All • wafersaw: Ron • amtetcher: Nahid • wbgeneral: Nathan • innotec: Nahid and Nathan • Laser ablator: Ron • To be completed: • Critical point dryer

  4. Thick SU-8 Characterization • Trying to obtain >300um layer of SU-8 • SU-8 2100 gives huge indentations • Reason: Expired, SU-8 2100 formulation • Tried SU-8 100 using recipe from last year • Second attempt: 450um +/- 25um • 7 hours to process • Set up oven in MERL

  5. Release Experiments

  6. Strain Gage Resistance • 1000 A of Au on 100 A of Cr • Desired resistance: 100 Ω • Measured resistance: 103.5 Ω • Measurement system resistance: 10 Ω • Trace resistance: ~6 Ω

  7. Runsheet

  8. Runsheet (cont’d)

  9. Next Steps • Further investigation of HF vapor: • Cr/SU-8 mask • SU-8 only mask • Exposure time for thick SU-8 layer • Characterize 35 um SU-8 layer • Test laser ablator • Wire bonding (wafer submitted to Pauline)

  10. Innotec • Reservation tomorrow 8 am – 12 pm • Current plan: • 100 A Cr • 1000 A Au • 100 A Cr

  11. Congratulations!!! • Nahid’s birthday • Sarah got hitched

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