“MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”

1. “MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems” • Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA • Founder • 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS) • Former Chairman of NEXUS, the European Microsystems Networking Association • Formerly with GEC Marconi, Plessey, Micronas, CSEM

2. Contents The world of Seismic sensing SHM in context of Seismic Market supply chain & applications Sensor Classification & standards Driving forces for Structural monitoring applications Technology Roadmap for MEMS based Strong Motion seismic sensors Conclusions

3. Seismic sensing Applications Energy Subsurface imaging (Oil, Gas, Geothermal) Defense Nuclear, Tunneling, Remote monitoring Civil protection Civil Engineering Structural monitoring Geoscience Geotechnics • Volcanic eruptions • Avalanches, landslides • Soil/rock mechanics Geodesy Geophysics ‘Free field’ • Techtonics • Volcanic • Site evaluation • Shake maps • Subsoil, microzonation • Requalification of structures • Land Use planning Construction • Pile driving, Compaction • Tunneling • Blasting, Mining • Quarrying, Demolition Industrial equipments • Nuclear Power plants • Dams, embankments • Bridges / Tunnels / Towers • LNG / Oil / Gas storage • Pipeline • Landfills • Tunnel monitoring • Traffic • (Rail and Road) monitoring • Large Buildings • Medical centers Rapid response, early warning, public information • Earthquake • Tsunami • Volcanic explosion • Landslip

4. Market supply chain Insurance Security ‘Building’ owners Consultants Government Agencies Universities Construction & Demolition companies System integrator Sensors, DS , SW + communications Regional suppliers N. America: Nanometrics, Kinemetric/Metrozet, Reftek EMEA: Syscom, Geosig, Guralp Asia: Mitsubishi, Kokusai, Aimil Hardware integrator Sensors + data recording + interface electronics Sensor Technology SM FBAs: Nanometrics, Kinemetrics, Guralp, Harbin SM MEMS: Colibrys, SDI, ADI Strain, Velocity Sensor manufacturer

5. Structural Health Monitoring Sensors Broadly 4 families of sensors Velocity: Broadband (high sensitivity), Short period and Strong motion velocity Accelerometers: „Strong Motion“ Class A-D Strain/Displacement: Positioning: GPS Important Standards: National e.g. USGS.... Regional e.g. State of California......

6. Classification - Strong Motion Class A Typically electromechanical Force Balance Accelerometers 5g (±3.5g +1g) High sensitivity, high linearity, low frequency response Expensive, fragile, low volume capacity, medium power Primary application: National (>70km spacing) and Regional (3-30km) networks Class B Typically MEMS closed loop sensor design 5g (±3.5g +1g) Medium sensitivity, medium linearity, medium frequency response, medium power Relatively inexpensive, robust, medium volume, Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring, Shake maps, modelling validation Class C Typically MEMS open loop based sensors 5g (±3.5g +1g) Low dynamic range/resolution, low linearity, medium frequency response, low power Inexpensive, robust, Medium / high volume, Primary application: Earthquake detection & intervention

7. Strong Motion StandardsClass A Specifications: USGS & ANSS specifications (13 June 2007) Technical: Range: >± 4.5 g , (± 3.5 g + 1 g gravity) Noise: Must: 145dB (0.02-2Hz); 130dB (2-50Hz) Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 5 years

8. Strong Motion StandardsClass B State of California specifications are a dominant standard Technical: Range: ± 5 g , (± 4 g + 1 g gravity) Noise: Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz) Wish: < 500 µg/√Hz in 1 to 100 Hz band Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 10 years

9. Market size by application & grade 100dB 1 µg/√Hz 120dB 300ng/√Hz 140dB 30ng/√Hz Class C Class B Class A Energy Oil and gas, discovery & reservoir monitoring 100 • Market Size $Mio National earthquake monitoring 10 Regional & Urban earthquake monitoring ‘Ground shake’ maps, Structural modeling & monitoring Earthquake detection & intervention Subsurface Mining & Downhole imaging 1 TAM: Internal estimates 2007-2010 Sensor level valuation Market size and growth are drivers in innovation! • Performance • S/N Dynamic range dB 9

10. Competitive supply base - today 100dB 1 µg/√Hz 120dB 300ng/√Hz 140dB 30ng/√Hz Class C Class B Class A Nanometrics Kinemetrics Electromechanical FBA 1000 Harbin SF1600 SF1500 SF2006 SF2005 • Price per axis ($) MS9005 100 Colibrys Consumer MEMS 10 MEMS Open loop FBA MEMS Closed loop • Performance • S/N Dynamic range dB 10

11. SF2006 Product Parts Mechanical Sensor Closed Loop Sigma-Delta ASIC PCB + electronic components Derivative of Oil/Gas ‘geophone’ Class B +/-5g seismic sensor State of California compliant RoHS compliant

12. Competitive position - today

13. Competitive position - today 100dB 1 µg/√Hz 120dB 300ng/√Hz 140dB 30ng/√Hz Class C Class B Class A Nanometrics Kinemetrics Electromechanical FBA 1000 Harbin SF1600 SF1500 SF2006 SF2005 • Price per axis ($) 100 MS9005 Colibrys Consumer MEMS 10 MEMS Open loop FBA MEMS Closed loop • Performance • S/N Dynamic range dB 13

14. Competitive position - Roadmap 100dB 1 µg/√Hz 120dB 300ng/√Hz 140dB 30ng/√Hz Class C Class B Class A Episensor Kinemetrics 1000 Electromechanical FBA Harbin MEMS Class A/B • Price per axis in USD MEMS Class B 100 Colibrys MSxxxx Lower cost MEMS 10 MEMS Open loop FBA MEMS Closed loop • Performance • Dynamic range dB 14

15. Strong Motion Roadmap MEMS based Class B sensors Smaller size, lower power, improved linearity, extended FS range Integrated wireless Lower power / energy harvesting MEMS based ‘Class A’ sensors Lower cost, more robust, lower power, smaller size

16. Target specifications • Goal is to replace traditional electromechanical devices (FBA) with closed loop MEMS technology

17. Class A MEMS Sensor prototype Prototype 10 g FS Inertial MEMS sensor Sensor component MEMS and FE ASIC in ceramic MCM PCB board FPGA Power supplies, clock Ethernet controller (for testing) Size Current board: 10 cm x 10 cm x 4mm Potential to make it much smaller Market Beta site sampling 2011/12 Conceptual drawing

18. Conclusions:MEMS continue to be a strong technology for new Strong Motion Seismic sensor developmentMy interests are today to: 1. Find potential interested partners for new MEMS Class A sensors?2. Understand objectives of Seismic sensor development within MEMCON FP7 ?3. Confirm if our market assessment is realistic?4. Increase awareness: Europe has a real solution in hand to counter US/HP long term roadmaps

19. Many thanks for listening to me!Many thanks to Philippe Krebs at Colibrys for his assistance in providing market details. “multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation” – culture of Colibryswww.colibrys.com